Toward the development of miniaturized Imaging systems for detection of pre-cancer

MR Descour, AHO Karkkainen… - Ieee Journal of …, 2002 - ieeexplore.ieee.org
MR Descour, AHO Karkkainen, JD Rogers, C Liang, RS Weinstein, JT Rantala, B Kilic…
Ieee Journal of Quantum Electronics, 2002ieeexplore.ieee.org
In this paper, we describe the progress toward the development of miniaturized imaging
systems with applications in medical imaging, and specifically, detection of pre-cancer. The
focus of the article is a miniature, optical-sectioning, fluorescence microscope. The miniature
microscope is constructed from lithographically printed optics and assembled using a bulk
micro-machined silicon microoptical table. Optical elements have been printed in a negative
tone hybrid glass to a maximum depth of 59/spl mu/m and an rms surface roughness …
In this paper, we describe the progress toward the development of miniaturized imaging systems with applications in medical imaging, and specifically, detection of pre-cancer. The focus of the article is a miniature, optical-sectioning, fluorescence microscope. The miniature microscope is constructed from lithographically printed optics and assembled using a bulk micro-machined silicon microoptical table. Optical elements have been printed in a negative tone hybrid glass to a maximum depth of 59 /spl mu/m and an rms surface roughness between 10-45 nm, fulfilling the requirements of the miniature microscope. Test optical elements have been assembled using silicon-spring equipped mounting slots. The design of silicon springs is presented in this paper. Optical elements can be assembled within the tolerances of an NA=0.4 miniature microscope objective, confirming the concept of simple, zero-alignment assembly.
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