nanolithography. Currently, the plasma is generated by irradiating tin-microdroplets with 10-
micometer wavelength light from CO2-gas lasers. Energy efficient solid-state lasers
providing 2-micron wavelength main-pulses may present a viable option for driving EUV-
emitting plasma. The 2-micron drive wavelength is situated between the well-studied cases
of 1-and 10-micron. Our experiments, using pre-pulse deformed tin droplet targets, show that …