The process flow features conventional gate-first high-k/metal and raised source/drains
(RSD). Back bias (V bb) enables V t modulation of more than 125mV with a V bb of 0.9 V
and BOX thickness of 12nm. This demonstrates the importance and viability of the UTBB
structure for multi-V t and power management applications. We explore the impact of GP,
BOX thickness and V bb on local V t variability for the first time. Excellent A Vt of 1.27 mV· µm …