… from the wafer surface”. This book focuses on ultraclean processing of silicon-wafer surfaces.
… involved in research, development, and manufacturing of VLSI chips, those concerned with …

… in the VLSI manufacturing process is to remove not only particles on the wafer surface, but
also contamination, such as metallic impurities, organic contaminants, surface films such as na…

… ultraclean wafer surfaces throughout the wafer processing cycles has been essential for the
successful manufacturing of semiconductor … the surface device region of the silicon substrate…

… As trends in ULSI high-performance and fabrication consistency continue, a … process for
silicon surfaces will become essential. Shifts to ultraclean surfaces enabled by dry processing …

… Process Materials Accompanying the growing importance of the need for wafer surface
cleanliness in VLSI manufacturing, the role of the wafer cleaning process has become crucial (…

… in function of silicon substrate characteristics, device layout, and process flow. The … process
is effectively used in MEMS fabrication as a surface finishing and polishing step, after wafer …

… One of the 'dirty little secrets' of wafer fabrication is how often … of a wafer fab is a finished
wafer containing on its surface from … processing equipment allows fabrication with silicon wafers …

… reliability in VLSI manufacturing processes … manufacturing technologies are being sought
which give consideration to making shorter cycle times, not only for existing mass production …

… manufacturing. High-performance cleaning is also extremely important to ensure high yields
in future mass production… of the device manufacturing process many additional functions are …

… much higher demand of an ultra clean interface than stripping the … of a (111) surface processed
similarly, but subsequently … commonly used process in semiconductor manufacturing [98]…