Uniform low-to-high in composition InGaN layers grown on Si

P Aseev, PEDS Rodriguez, P Kumar… - Applied Physics …, 2013 - iopscience.iop.org
Applied Physics Express, 2013iopscience.iop.org
Uniform, compact, and thick InGaN layers are grown on Si (111) substrates by plasma-
assisted molecular beam epitaxy without any buffer layers at low temperatures of around
320 C. By adjusting the Ga/In flux ratio, InGaN layers with In compositions between 10 and
33% are obtained, providing emission covering the whole visible spectral range. The In
composition varies less than 2% over large areas, and the single-crystalline hexagonal
InGaN layers have a well-defined epitaxial relationship with the Si substrate …
Abstract
Uniform, compact, and thick InGaN layers are grown on Si (111) substrates by plasma-assisted molecular beam epitaxy without any buffer layers at low temperatures of around 320 C. By adjusting the Ga/In flux ratio, InGaN layers with In compositions between 10 and 33% are obtained, providing emission covering the whole visible spectral range. The In composition varies less than 2% over large areas, and the single-crystalline hexagonal InGaN layers have a well-defined epitaxial relationship with the Si substrate. Photoluminescence is observed up to room temperature, opening the prospect for the direct integration of InGaN light-emitting devices with Si technology.
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