Vertical multiple-slot waveguide ring resonators in silicon nitride
Optics express, 2008•opg.optica.org
This article describes the first demonstration of ring resonators based on vertical multiple-
slot silicon nitride waveguides. The design, fabrication and measurement of multiple-slot
waveguide ring resonators with several coupling distances and ring radii (70 μm, 90 μm and
110 μm) have been carried out for TE and TM polarizations at the wavelength of 1.3 μm.
Quality factors of 6,100 and 16,000 have been achieved for TE and TM polarization,
respectively.
slot silicon nitride waveguides. The design, fabrication and measurement of multiple-slot
waveguide ring resonators with several coupling distances and ring radii (70 μm, 90 μm and
110 μm) have been carried out for TE and TM polarizations at the wavelength of 1.3 μm.
Quality factors of 6,100 and 16,000 have been achieved for TE and TM polarization,
respectively.
This article describes the first demonstration of ring resonators based on vertical multiple-slot silicon nitride waveguides. The design, fabrication and measurement of multiple-slot waveguide ring resonators with several coupling distances and ring radii (70 μm, 90 μm and 110 μm) have been carried out for TE and TM polarizations at the wavelength of 1.3 μm. Quality factors of 6,100 and 16,000 have been achieved for TE and TM polarization, respectively.
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