Vertical silicon nanowire platform for low power electronics and clean energy applications

DL Kwong, X Li, Y Sun, G Ramanathan… - Journal of …, 2012 - Wiley Online Library
DL Kwong, X Li, Y Sun, G Ramanathan, ZX Chen, SM Wong, Y Li, NS Shen, K Buddharaju…
Journal of Nanotechnology, 2012Wiley Online Library
This paper reviews the progress of the vertical top‐down nanowire technology platform
developed to explore novel device architectures and integration schemes for green
electronics and clean energy applications. Under electronics domain, besides having
ultimate scaling potential, the vertical wire offers (1) CMOS circuits with much smaller foot
print as compared to planar transistor at the same technology node,(2) a natural platform for
tunneling FETs, and (3) a route to fabricate stacked nonvolatile memory cells. Under clean …
This paper reviews the progress of the vertical top‐down nanowire technology platform developed to explore novel device architectures and integration schemes for green electronics and clean energy applications. Under electronics domain, besides having ultimate scaling potential, the vertical wire offers (1) CMOS circuits with much smaller foot print as compared to planar transistor at the same technology node, (2) a natural platform for tunneling FETs, and (3) a route to fabricate stacked nonvolatile memory cells. Under clean energy harvesting area, vertical wires could provide (1) cost reduction in photovoltaic energy conversion through enhanced light trapping and (2) a fully CMOS compatible thermoelectric engine converting waste‐heat into electricity. In addition to progress review, we discuss the challenges and future prospects with vertical nanowires platform.
Wiley Online Library
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