Vibrations of free and surface‐coupled atomic force microscope cantilevers: Theory and experiment
U Rabe, K Janser, W Arnold - Review of scientific instruments, 1996 - pubs.aip.org
With an optical interferometer, the free vibration spectra and the local vibration amplitude of
four rectangular atomic force microscope cantilevers made of silicon have been examined
experimentally in a spectral range of 100 kHz to 10 MHz. A good agreement with the flexural
wave theory of elastic beams was found. Coupling to torsional vibrations was also observed.
When the sensor tip of the cantilever is in contact with a sample surface the resonances are
shifted in frequency and the vibration amplitudes along the cantilever change. A method is …
four rectangular atomic force microscope cantilevers made of silicon have been examined
experimentally in a spectral range of 100 kHz to 10 MHz. A good agreement with the flexural
wave theory of elastic beams was found. Coupling to torsional vibrations was also observed.
When the sensor tip of the cantilever is in contact with a sample surface the resonances are
shifted in frequency and the vibration amplitudes along the cantilever change. A method is …
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