… MOEMS PROCESS In this section, the fabrication process of the MOEMS will be studied.
It is composed of an optical readout strategy based on PBG materials and a SOI-based …

… In this paper, the development of an integrated gyroscope based on photonic bandgap
materials has been conceived, realized and tested. The structure is composed of a symmetric …

… crystal wavelength modulated MOEMS gyroscope is reported… , the performance of MOEMS
gyroscopes is largely improved, … an moems gyroscope based on photonic bandgap materials,…

… Benefitting from an ultrawide bandgap of the cascaded structure, the proposed gyroscope
can in principle operated within a wide spectrum over 175 nm, indicating the great potential for …

In this paper, a novel vibratory optical MEMS gyroscope is proposed, which is composed of
an optical sensing system, an electrostatic comb-drive actuator, and a mass-spring system …

… In this paper, the development of MOEMS based on transparent metals has been performed.
The theory of the PBG has been applied in integrated scale (a custom technology named …

… MOEMS use rings/ disks/spheres or can potentially use them. Ring-based MOEMS share
many common parts with other MOEMS … bandgap of the material used to make the waveguide. …

… of ring laser gyros, fiber optic gyros and integrated optical gyros is accurately reviewed.
Vibratory gyros and, in particular, MEMS gyros are the topic of Chap. 6, where MOEMS gyros are …

… This paper presents MOEMS accelerometer sensor by using photonic crystal. A spring mass
system … for HIS and RIA configuration-based MOEMS sensor for vibration monitoring system. …

… As MEMS technology improves, microoptical electromechanical system (MOEMS) gyroscopes
combining MEMS technology with conventional optical technology appear to minimize the …