… their residual carrier concentration. For this purpose, an SSRM calibration profile has been
… -adapted technique for two dimensional dopant/carrier profiling on ZnO at nanoscale. Finally…

… dopant concentration along the surface of a processed semiconductor wafer, is scanning …
Since the SCM provides a measure of the majority carrier concentration, extracting a dopant …

… pμp), where μ is the carrier mobility and n and p are the carrier concentrations for holes and
electrons, respectively. Conventional, point-contact profiling techniques, such as dual probe …

… with the corresponding calibration curve determines the carrier concentration. For a non-monotonous
behaviour two intersection points and hence two carrier concentration values are …

… the product of the local free-carrier concentration (n) and the carrier mobility (μ) near the
point contact. However, variations in the tip–surface contact resistance must also be considered.…

… concentration has always been challenging. Here we show how to probe the charge carrier
density of zinc oxide thin films by Scanning … By doing so, we are able to calibrate each tip. …

… The scanning microwave microscope is used for calibrated capacitance spectroscopy and
… On silicon semiconductor calibration samples with doping concentrations ranging from 10 …

… calibration curves and the fast quantification of one-dimensional and two-dimensional
resistivity (and carrier… to the concentration range of interest) and have been calibrated with the …

… The second calibration method includes direct measurement of the etching rate as a function
of carrier concentration using homogeneously doped bulk or epitaxially grown Si samples. …

… of carrier profiling is that the capacitance variation in response to Vac reflects the corresponding
carrier concentration… structures with varying Ga dopant concentrations. Besides, residual …