… fused quartz at 1300C for one hour achieves the best result, followed in effectiveness by the
RCA-1 surface treatment, while KOH etching, BOE, and HF/HCl etching … HF/HCl etching and …

… fused quartz using a C4F8/He gas mixture with the polysilicon film and bonded silicon wafer
as an etch … The SEM image of the DRIE-etched fused quartz microstructures is shown in Fig. …

… In this paper, the fabricationof fused quartz microchips is … below themelting temperature of
fused quartz. A simple cross channel … , wet chemical etching and bonding techniques.14 First, …

… induced chemical etching (ECICE) as a method to achieve nanogram-level, low-cost,
stress-free, and stable material removal of fused quartz. A modeling analysis of the etching process …

… Glass and fused-quartz are commonly used in … their chemical inertness and optical
transparency. This study focuses on the etching of glass and fused-quartz using chemical etching …

… Quartz crystals are chemically identical to fused quartz, both being SiO 2 . fused quartz is …
This is mainly because RIE etching involves both physical and chemical etching processes. …

… The SEM image of the etched 50-gm-thick fused quartz microstructures is shown in Fig.
Almost vertical profile angle is achieved by using the aboveprocess conditions. …

… driven fused-quartz micro… of fused quartz are beneficial. Further improvement of the device
Q would be expected if we could improve the etch precision with surface quality of quartz …

… method for fused quartz hemispherical resonator based on the ion beam etching process is
… The 3rd stage: The chemical etching is used again to improve the quality factor to more than …

… process recipe for the plasma etching of deep high-aspect ratio features into fused silica (fused
quartz) material using an inductively coupled plasma reactive-ion etch process. As part of …