… MEMS gyroscope is proposed, which is composed of an optical sensing system, an electro-static
comb-drive … The sensitive element of the proposed gyroscope has been designed with …

… The silicon layer of 450 μm has been used as a proof mass of the MOEMS gyroscope, while
the … an electrostatic voltage applied between the proof mass and the comb drive (left stator). …

… Gyroscopes are used as important sensors in various applications to control objects. In
this article, a vibrating MOEMS gyroscope is introduced with a new comb-drive structure. The …

… remains challenging if high performance MOEMS gyroscope sensors are to be realized. …
modulated MOEMS gyroscope is proposed. The sensor uses an electrostatic force to drive the …

… Positive polarity causes the proof mass to vibrate along the drive axis by comb drives. Au
nano-… Furthermore, the comb drive gap (g) is chosen to be maximized, because this leads to …

… Three of the gyroscope modes were considered in this study: the drive mode, … drive mode
is a differential mode when the gyroscope operates, and the drive frequency depends on drive …

… MOEMS gyros are under investigation since several years. Main achievements of this …
MOEMS gyros are under investigation since several years. Main achievements of this research …

… disc sensitive structure of the MOEMS resonator gyroscope (MOEMS-RG). … MOEMS-RG is
presented in this paper. The mechanical sensitivity and transducer sensitivities of the MOEMS-…

… of the tuning fork gyroscope performance, the proposed gyroscope in this paper has its
own advantages as shown in table 3. From increasing the driving amplitude to improving the …

… In this paper, a waveguiding MOEMS gyroscope with an ultrawide optical bandwidth is
proposed, using tunable cascaded Fabry–Perot cavities consisting of Bragg mirrors. Input rotation …