Z Min, Y Shubin, Y Yingzhan, J Pengfei… - … Technology and 10th …, 2010 - ieeexplore.ieee.org
… The optical structure of the MOEMS gyroscope proposed in this paper is shown in Fig.1.a,
which … Optical structure of MOEMS gyroscope. b. The two beams transmitted on port 1,3 were …