Design and analysis of a novel MOEMS gyroscope using an electrostatic comb-drive actuator and an optical sensing system

A Sheikhaleh, K Jafari, K Abedi - IEEE Sensors Journal, 2018 - ieeexplore.ieee.org
gyroscope using Coriolis force to detect and measure the applied angular rate. Thus, a
micromechanical gyroscope … proposed optical MEMS gyroscope. Section III includes design and …

Design and analysis of a MOEMS gyroscope based on a ring-shaped hybrid structure

J Gholinejad, K Abedi - Plasmonics, 2023 - Springer
… This paper presents a double-sided gyroscope that uses a novel vibrating MOEMS structure
… mechanical and optical parameters on the functions of the designed gyroscope is proposed. …

Fabrication and characterization of an MOEMS gyroscope based on photonic bandgap materials

C Trigona, B Andò, S Baglio - IEEE Transactions on …, 2016 - ieeexplore.ieee.org
… study of an integrated gyroscope, and in this paper, there is a more comprehensive and
exhaustive analysis of the device with an accurate description of the design, layout, modeling, …

A new design of an MOEMS gyroscope based on a WGM microdisk resonator

D Xia, L Huang, L Zhao - Sensors, 2019 - mdpi.com
… the MOEMS gyroscope can be concluded. When an applied angular velocity exerts the Coriolis
force on the MOEMS … In summary, the function of the MOEMS gyroscope is based on the …

Research on the disc sensitive structure of a micro optoelectromechanical system (MOEMS) resonator gyroscope

X Shen, L Zhao, D Xia - Micromachines, 2019 - mdpi.com
… Modal analysis was carried out for the disc sensitive structure of the MOEMS resonator
gyroscope (MOEMS-… Modal analysis of the MOEMS-RG is carried out in this section. The working …

Investigation and analysis of a MOEMS gyroscope based on novel resonator

Z Min, Y Shubin, Y Yingzhan, J Pengfei… - … Technology and 10th …, 2010 - ieeexplore.ieee.org
… The optical structure of the MOEMS gyroscope proposed in this paper is shown in Fig.1.a,
which … Optical structure of MOEMS gyroscope. b. The two beams transmitted on port 1,3 were …

Optimization and Fabrication of an MOEMS Gyroscope Based on a WGM Resonator

D Xia, B Zhang, H Wu, T Wu - Sensors, 2020 - mdpi.com
Analysis and Optimization of the MOEMS Gyroscope The optimization of the MOEMS
gyroscope is focused on in this section, which mainly includes the optimization of the WGM …

Design and analysis of a Robust gyroscope via grating SPP on cantilever

J Gholinejad, K Abedi - Sensing and Imaging, 2024 - Springer
… Optical gyroscopes are vital sensors in various applications such as transportation. In this
paper, a double-sided opto-plasmonic gyroscope using a MOEMS cantilever is designed. The …

High-Sensitivity MOEMS Gyroscope Based on Photonic Crystal Wavelength Modulation

X Yang, D Xia, B Fu, J Li, J Zhao… - IEEE Sensors Journal, 2024 - ieeexplore.ieee.org
… Abstract— In this paper, a two-dimensional (2D) tunable photonic crystal wavelength
modulated MOEMS gyroscope is reported. The device consists of a mechanical structure and an …

Research on a novel MOEMS interferometric gyroscope

H Liu, L Feng, H Lin, C Zhang - Sixth International Symposium …, 2006 - spiedigitallibrary.org
MOEMS gyroscope combines advantages of optical detect principle of optical gyroscopes
and fabrication technique of MEMS gyroscopes [… considered that MOEMS inertial equipment is …