AM Kiefer, DM Paskiewicz, AM Clausen… - ACS …, 2011 - ACS Publications
… nanomembranes is qualitatively different from the Smart Cut (ie, ion-cutting) process of transferring thin layers to a new host substrate on the waferscale. … and germaniumwafer bonding …
Q Guo, Z Di, MG Lagally, Y Mei - Materials Science and Engineering: R …, 2018 - Elsevier
Silicon (Si) and/or germanium (Ge) nanomembranes (NMs) play crucial roles in various applications, including conventional microelectronics, as well as recently emerging high-…
… The SiGe NM is transferred to a new host substrate (in this work an oxidized Si wafer) and bonded there before a lattice matched SiGe buffer layer and strained-Si QW are epitaxially …
… scale (for example, waferscale), which is superior to current 2D material–based optoelectronic devices and can be a competitive building block for next-generation functional electronic/…
… This work demonstrates large-area self-supporting Ge nanomembranes and provides an empirical guide for their synthesis. The process applies dry etching with ICP-RIE fluorine-based …
… in polymeric films are developed on Ge nanomembranes using direct membrane assembly. … These results show that ultrathin nanomembrane active layers can be effectively coupled to …
… Germanium (Ge) substrates are employed for III-V … Ge nanomembranes (NMs) are gaining attention to reduce Ge consumption through substrate reuse. The Porous germanium Efficient …
Q Guo, Y Fang, M Zhang, G Huang… - … on Electron Devices, 2016 - ieeexplore.ieee.org
… planar photodetectors using flat germaniumnanomembranes. Furthermore, … germanium nanomembranes into the field of flexible/wearable optoelectronics. Index Terms— Germanium …
N Paupy, ZO Elhmaidi, A Chapotot, T Hanuš… - 2023 - hal.science
… Nanomembranes (NMs) provide an alternative to this approach while offering … the Porous germanium Efficient Epitaxial LayEr Release (PEELER) process for waferscale growth of …