[HTML][HTML] Wafer-scale detachable monocrystalline germanium nanomembranes for the growth of III–V materials and substrate reuse

N Paupy, ZO Elhmaidi, A Chapotot, T Hanuš… - Nanoscale …, 2023 - pubs.rsc.org
… the Porous germanium Efficient Epitaxial LayEr Release (PEELER) process for wafer-scale
growth of … This approach consists of four key steps: (i) wafer-scale porosification by bipolar …

Si/Ge junctions formed by nanomembrane bonding

AM Kiefer, DM Paskiewicz, AM Clausen… - ACS …, 2011 - ACS Publications
nanomembranes is qualitatively different from the Smart Cut (ie, ion-cutting) process of
transferring thin layers to a new host substrate on the wafer scale. … and germanium wafer bonding …

Strain engineering and mechanical assembly of silicon/germanium nanomembranes

Q Guo, Z Di, MG Lagally, Y Mei - Materials Science and Engineering: R …, 2018 - Elsevier
Silicon (Si) and/or germanium (Ge) nanomembranes (NMs) play crucial roles in various
applications, including conventional microelectronics, as well as recently emerging high-…

[HTML][HTML] Nanomembrane-based materials for Group IV semiconductor quantum electronics

DM Paskiewicz, DE Savage, MV Holt, PG Evans… - Scientific Reports, 2014 - nature.com
… The SiGe NM is transferred to a new host substrate (in this work an oxidized Si wafer) and
bonded there before a lattice matched SiGe buffer layer and strained-Si QW are epitaxially …

Single-crystalline germanium nanomembrane photodetectors on foreign nanocavities

Z Xia, H Song, M Kim, M Zhou, TH Chang, D Liu… - Science …, 2017 - science.org
scale (for example, wafer scale), which is superior to current 2D material–based optoelectronic
devices and can be a competitive building block for next-generation functional electronic/…

[HTML][HTML] A scalable, resource-efficient process for synthesis of self-supporting germanium nanomembranes

G El Jamal, G Nagy, D Primetzhofer, TT Tran - Materials Science in …, 2024 - Elsevier
… This work demonstrates large-area self-supporting Ge nanomembranes and provides an
empirical guide for their synthesis. The process applies dry etching with ICP-RIE fluorine-based …

[HTML][HTML] Flexible nanomembrane photonic-crystal cavities for tensilely strained-germanium light emission

J Yin, X Cui, X Wang, P Sookchoo, MG Lagally… - Applied Physics …, 2016 - pubs.aip.org
… in polymeric films are developed on Ge nanomembranes using direct membrane assembly.
… These results show that ultrathin nanomembrane active layers can be effectively coupled to …

Sequential fabrication of multiple Ge nanomembranes from a single wafer: Towards sustainable recycling of Ge substrates

A Chapotot, B Ilahi, T Hanuš, G Hamon, J Cho… - Sustainable Materials …, 2024 - Elsevier
Germanium (Ge) substrates are employed for III-V … Ge nanomembranes (NMs) are gaining
attention to reduce Ge consumption through substrate reuse. The Porous germanium Efficient …

Wrinkled single-crystalline germanium nanomembranes for stretchable photodetectors

Q Guo, Y Fang, M Zhang, G Huang… - … on Electron Devices, 2016 - ieeexplore.ieee.org
… planar photodetectors using flat germanium nanomembranes. Furthermore, … germanium
nanomembranes into the field of flexible/wearable optoelectronics. Index Terms— Germanium

[PDF][PDF] Nanoscale Advances

N Paupy, ZO Elhmaidi, A Chapotot, T Hanuš… - 2023 - hal.science
Nanomembranes (NMs) provide an alternative to this approach while offering … the Porous
germanium Efficient Epitaxial LayEr Release (PEELER) process for waferscale growth of …