… In [7], a digital inverter and NAND gate have been … such MEMS switches. Motorola has
demonstrated implementation of different low-frequency logic operations using the MEMS switch …

… of NEMS switches. In this paper, AlN-based piezoelectric MEMS switches have been used
for … were connected by wire bonding for the testing of the complimentary MEMS inverter. (b) A …

… switches, we configured a MEMS inverter and a MEMS latch. Figure 6(a) shows a schematic
view of the inverter. … The proposed switch facilitates mechanical logic gates operating at low …

… an integrated logical inverter is needed. This paper presents the design and experimental
characterization of a MEMS logical inverter which is fully compatible with the RF MEMS …

… switch is proposed as a promising alternative to p-type oxide TFTs by S.-HK Park, J.-B. … a
MEMS switch vertically stacked on top of the n-type oxide TFT. On page 1390, the logic device …

… MEMS components. This paper presents results on using piezoelectrically-actuated MEMS
switches for simple logic … cascading an odd number of logic inverters and feeding the output …

… , including a previous version of digital MEMS logic gates [7], … can function as anything from
an inverter to an XOR and thus … or switches necessary to produce the logic function of interest…

… ] to realize a single stage inverter and buffer. Complementary MEMS switches that work in
a seesaw manner are one of the popular architectures for logic gates since they provide more …

… In this paper we have presented very efficient and simple model of MEMS switching technique
to get low actuation voltage and large capacitive change, which will be very much suitable …

… From classical CMOS inverter to inverter based on adiabatic logic. a) Schematic of a
conventional CMOS inverter. b) Equivalent circuit in charging phase. c) Equivalent circuit in …