… , we describe the monolithic integration of 3-D antenna structures with RF MEMS switches on
a … The compatible structures of an antenna element and RF MEMS switch allow monolithic …

… monolithic integration of an RF MEMS switch matrix is presented. Novel SP3T RF MEMS
switches are designed and monolithically integrated … A prototype unit of a 3x 3 monolithic switch …

… , we propose to use an RF MEMS crossbar switch matrix that provides flexibility in size …
switch cell that can be easily integrated into a matrix without any topology limitations. The switch …

… As a next step, different types of MEMS circuits together with monolithically integrated active
… mm-wave MEMS switching and phase shifting circuits together with on-wafer integrated …

… The RF-MEMS switch in this study consists of three main parts: a suspended movable
membrane, two paired highvoltage electrodes, and the RF signal line (Fig. 3). The insertion loss (IL…

… (MEMS) waveguide switch for millimeter-wave application is presented. The switch is based
on the monolithic integration of MEMS … for all different types of RF MEMS switches [35]. Thus, …

… Electrostatically actuated RF MEMS switches and switched capacitors, on the other hand, …
with the MEMS switch through monolithic integration. Additionally, it is possible to integrate the …

… Under this section, three main technology modules, namely RF-MEMS switch, TSVs and
microfluidic channels are given. The technology integration and the performance parameters of …

… to form a MEMS programmable lens-array (MPLA). In this implementation, MEMS switches
are … in a design that is suitable for monolithic integration and wafer-scale packaging. The …

… Such circuits exhibit improved performance compared with HEMT-based switch … MEMS
switches. More advanced architectures being explored include the integration of MEMS switch or …