Selectivity enhancement of metal oxide gas sensors using a micromachined gas chromatographic column

…, J Stürmann, S Nicoletti, L Dori, GC Cardinali - Sensors and Actuators B …, 2005 - Elsevier
gas chromatographic separation of the compounds contained in an air sample. In this work,
a system based on a micromachined gas chromatographic packed columnmicromachined

Design, fabrication, and evaluation of microfabricated columns for gas chromatography

G Lambertus, A Elstro, K Sensenig, J Potkay… - Analytical …, 2004 - ACS Publications
… The design, fabrication, and performance of gas chromatography columns etched in silicon
substrates are described. Deep reactive-ion etching formed the 3-m-long, 150-μm-wide, 240-…

Micro machined analytical gas chromatograph with a plasma polymerised stationary phase

U Lehmann, O Krusemark, J Müller, A Vogel, D Binz… - 2001 - osti.gov
… The new micro machined 2 m separation column is covered by a … a micro machined gas
chromatographic column. The plasma polymerisation of the stationary phase on the column walls…

… gas chromatography system used to separate and detect ammonia and nitrogen dioxide. I. Design, fabrication, and integration of the gas chromatography system

RR Reston, ES Kolesar - Journal of Microelectromechanical …, 1994 - ieeexplore.ieee.org
… coating after the column is fabricated. One critical advantage of the micromachined column
design developed in this research is the accessibility of the inner surfaces of the column

Silicon micromachined gas chromatography system

ES Kolesar, RR Reston - 1997 Proceedings Second Annual …, 1997 - ieeexplore.ieee.org
… of a micromachined, interlocking, spiral-shaped capillary column … The lower portion of the
micromachined GC column is … the matching upper portion of the column is etched in a 4-inch …

Temperature-programmed sputtered micromachined gas chromatography columns: An approach to fast separations in oilfield applications

R Haudebourg, J Vial, D Thiebaut, K Danaie… - Analytical …, 2013 - ACS Publications
… SEM picture of the graphite-sputtered layer deposited on the inner wall of a silicon
micromachined gas chromatography column. The structure in sheets is due to the etching process; …

The effect of the channel curve on the performance of micromachined gas chromatography column

H Yuan, X Du, H Tai, Y Li, X Zhao, P Guo… - Sensors and Actuators B …, 2017 - Elsevier
… According to the theory of a gas chromatography column, the … columns which utilized
embedded posts to obtain a more uniform lateral distribution compared to the open tubular columns

Silicon‐Micromachined Gas Chromatographic Columns for the Development of Portable Detection Device

JB Sanchez, A Schmitt, F Berger, C Mavon - Journal of Sensors, 2010 - Wiley Online Library
… We report the fabrication of a gas chromatographic column … of various chemical compounds
(gas or vapour). PDMS, PEG, … a GC microcolumn with a metal oxide-based gas sensor. The …

Multiple-stage microfabricated preconcentrator-focuser for micro gas chromatography system

WC Tian, HKL Chan, CJ Lu, SW Pang… - Journal of …, 2005 - ieeexplore.ieee.org
… on the system requirements of the micromachined GC column. The total heating time was
40 s with 20 s for stop-flow and 20 s for carrier gas flow. The power required to achieve 300 …

Review and summary of a silicon micromachined gas chromatography system

ES Kolesar, RR Reston - IEEE Transactions on Components …, 1998 - ieeexplore.ieee.org
gas chromatography (GC) system has been designed and fabricated using silicon
micromachining … The silicon micromachined gas chromatography system (SMGCS) is composed …