G Lambertus, A Elstro, K Sensenig, J Potkay… - Analytical …, 2004 - ACS Publications
… The design, fabrication, and performance of gaschromatographycolumns etched in silicon substrates are described. Deep reactive-ion etching formed the 3-m-long, 150-μm-wide, 240-…
U Lehmann, O Krusemark, J Müller, A Vogel, D Binz… - 2001 - osti.gov
… The new micromachined 2 m separation column is covered by a … a micromachinedgas chromatographiccolumn. The plasma polymerisation of the stationary phase on the column walls…
RR Reston, ES Kolesar - Journal of Microelectromechanical …, 1994 - ieeexplore.ieee.org
… coating after the column is fabricated. One critical advantage of the micromachinedcolumn design developed in this research is the accessibility of the inner surfaces of the column …
ES Kolesar, RR Reston - 1997 Proceedings Second Annual …, 1997 - ieeexplore.ieee.org
… of a micromachined, interlocking, spiral-shaped capillary column … The lower portion of the micromachinedGCcolumn is … the matching upper portion of the column is etched in a 4-inch …
R Haudebourg, J Vial, D Thiebaut, K Danaie… - Analytical …, 2013 - ACS Publications
… SEM picture of the graphite-sputtered layer deposited on the inner wall of a silicon micromachinedgaschromatographycolumn. The structure in sheets is due to the etching process; …
H Yuan, X Du, H Tai, Y Li, X Zhao, P Guo… - Sensors and Actuators B …, 2017 - Elsevier
… According to the theory of a gaschromatographycolumn, the … columns which utilized embedded posts to obtain a more uniform lateral distribution compared to the open tubular columns…
JB Sanchez, A Schmitt, F Berger, C Mavon - Journal of Sensors, 2010 - Wiley Online Library
… We report the fabrication of a gaschromatographiccolumn … of various chemical compounds (gas or vapour). PDMS, PEG, … a GC microcolumn with a metal oxide-based gas sensor. The …
WC Tian, HKL Chan, CJ Lu, SW Pang… - Journal of …, 2005 - ieeexplore.ieee.org
… on the system requirements of the micromachinedGCcolumn. The total heating time was 40 s with 20 s for stop-flow and 20 s for carrier gas flow. The power required to achieve 300 …
ES Kolesar, RR Reston - IEEE Transactions on Components …, 1998 - ieeexplore.ieee.org
… gaschromatography (GC) system has been designed and fabricated using silicon micromachining … The silicon micromachinedgaschromatography system (SMGCS) is composed …