PE-MOCVD of dielectric thin films: Challenges and opportunities

SK Dey, PV Alluri - MRS Bulletin, 1996 - cambridge.org
… Table I specifically illustrates some electronic applications along with their estimated … ,
recent experiments in our laboratory using ECR-MOCVD have produced encouraging results. For …

Opportunities and challenges in GaN metal organic chemical vapor deposition for electron devices

K Matsumoto, Y Yamaoka, A Ubukata… - Japanese Journal of …, 2016 - iopscience.iop.org
… The challenges in GaN MOCVD for electron device application for … application, n-GaN with
a donor concentration of 1 × 10 16 cm −3 was grown at a rate of 3.7 µm/h. The next challenge

Principles of Selective Area Epitaxy and Applications in III–V Semiconductor Lasers Using MOCVD: A Review

B Wang, Y Zeng, Y Song, Y Wang, L Liang, L Qin… - Crystals, 2022 - mdpi.com
… Selective area epitaxy (SAE) using metal–organic chemical vapor deposition (MOCVD) is
a … This paper presents a review of the applications of SAE in semiconductor lasers. Growth …

Recent advances and challenges in the MOCVD growth of indium gallium nitride: A brief review

AK Tan, NA Hamzah, MA Ahmad, SS Ng… - Materials Science in …, 2022 - Elsevier
… This article discusses the key challenges and the recent breakthroughs in realizing high-…
chemical vapor deposition (MOCVD) technique. The main challenges such as the difficulties in …

Future aspects of MOCVD technology for epitaxial growth of semiconductors

T Detchprohm, JH Ryou, X Li… - … , and Applications, 2019 - Wiley Online Library
device applications such as UV optical sources and detectors and highpower electronics.
Thus, the III‐N MOCVD … specific commercial device applications of MOCVD‐grown materials. …

MOCVD for complex multicomponent thin films—a leading edge technology for next generation devices

M Schumacher, J Lindner, PK Baumann… - Materials Science in …, 2002 - Elsevier
… On the contrary, for applications in the field of compound semiconductor devices, MOCVD
is … To reach a similar degree of acceptance of MOCVD in mainstream silicon applications for …

'Old Chemistries' for new applications: Perspectives for development of precursors for MOCVD and ALD applications

A Devi - Coordination chemistry reviews, 2013 - Elsevier
… All these factors make these compounds attractive for MOCVD and LI-MOCVD applications
as well. Moreover, the decomposition temperature of the mixed alkoxide–ketoesters, are …

Recent advances in MOCVD process technology for the growth of compound semiconductor devices

B Schineller, M Heuken - Applied Physics A, 2007 - Springer
… In addition, MOCVD has coped with the challenge of increasing … -cut, enables the MOCVD
technology of GaN-based devices to … cost per device, open up new markets and applications. …

Strained-layer quantum well materials grown by MOCVD for diode laser application

LJ Mawst, H Kim, G Smith, W Sun, N Tansu - Progress in Quantum …, 2021 - Elsevier
device performance has been achieved, many challenges … chemical vapor deposition (MOCVD)
process is generally the … will focus primarily on MOCVD-grown materials and devices. …

[图书][B] Metalorganic vapor phase epitaxy (MOVPE): Growth, materials properties, and applications

S Irvine, P Capper - 2019 - books.google.com
devices used for a myriad of electrical switching applications … of other energy‐hungry
applications. All satellites launched … will be used for many more applications and is now poised to …