B Zhou, W Jia, P Sun, J Wang, W Liu, C Zhou - Optics Express, 2020 - opg.optica.org
… Under the optimal thickness of Ta 2 O 5 and SiO 2 , Fig. 5 shows the dependence of diffraction
efficiency on the cylindrical hole depth, which is not equal to the thickness of Ta 2 O 5 film …