Dieses Buch gibt einen umfassenden Überblick über die theoretischen und experimentellen
Grundlagen der Mikrosystemtechnik. Im Mittelpunkt steht der Systemgedanke, dh die …

Die dritte Auflage des mittlerweile zum Standardwerk gereiften Lehrbuchs trägt den
rasanten Entwicklungen in diesem interdisziplinären Gebiet umfassend Rechnung …

Over half a century after the discovery of the piezoresistive effect, microsystem technology
has experienced considerable developments. Expanding the opportunities of …

This book systematically describes the design options for micro systems as well as the
equations needed for calculating the behavior of their basic elements. The fundamental …

In ten sections this book describes the principles and technology of Micro Mechanical
Systems. Section one is a general introduction to the historical background and the parallels …

Microelectromechanical systems (MEMS), micro systems technologies (MST, primarily in
Europe) and micromanufacturing have become synonymous with the design, development …

This edition of'Micro Process Engineering'was originally published in the successful series'
Advanced Micro & Nanosystems'. Authors from leading industrial players and research …

Microsystem technology (MST) integrates very small (up to a few nanometers) mechanical,
electronic, optical, and other components on a substrate to construct functional devices …

It is a real pleasure to write the Foreword for this book, both because I have known and
respected its author for many years and because I expect this book's publication will mark an …

This book on mechanical microsensors is based on a course organized by the Swiss
Foundation for Research in Microtechnology (FSRM) in Neuchatel, Swit zerland, and …