Meandering-trapezoidal shaped MEMS structure for low frequency vibration based energy harvesting applications

B Debnath, R Kumar, PM Shakeel - Sustainable Energy Technologies and …, 2020 - Elsevier
In this study, we explore the design of new two highly symmetric springs of Meandering-
Trapezoidal shaped microelectromechanical system (MEMS) structure based biosensor …

Design and fabrication of vibration based energy harvester using microelectromechanical system piezoelectric cantilever for low power applications

M Kim, SK Lee, YS Yang, J Jeong… - … of nanoscience and …, 2013 - ingentaconnect.com
We fabricated dual-beam cantilevers on the microelectromechanical system (MEMS) scale
with an integrated Si proof mass. A Pb (Zr, Ti) O3 (PZT) cantilever was designed as a …

T-shaped piezoelectric structure for high-performance MEMS vibration energy harvesting

S Nabavi, L Zhang - Journal of Microelectromechanical …, 2019 - ieeexplore.ieee.org
In the recent decades energy harvesting from ambient vibration by the micro-
electromechanical systems (MEMS) has been recognized as a promising solution to …

A miniature mechanical-piezoelectric-configured three-axis vibrational energy harvester

CF Hung, TK Chung, PC Yeh, CC Chen… - IEEE Sensors …, 2015 - ieeexplore.ieee.org
In this paper, we demonstrate a novel robust miniature three-axis vibrational energy-
harvester using a mechanical-piezoelectric configuration. Using the configuration, the …

Piezoelectric MEMS energy harvester for low-frequency vibrations with wideband operation range and steadily increased output power

H Liu, CJ Tay, C Quan, T Kobayashi… - Journal of …, 2011 - ieeexplore.ieee.org
A piezoelectric MEMS energy harvester (EH) with low resonant frequency and wide
operation bandwidth was designed, microfabricated, and characterized. The MEMS …

The output power improvement and durability with different shape of MEMS piezoelectric energy harvester

CT Chen, YH Fu, WH Tang, SC Lin… - Smart Structures and …, 2018 - spiedigitallibrary.org
MEMS piezoelectric energy harvester (PEH) has been widely designed in cantilever beam
style because of ease of fabrication and effective to generate large strain and output power …

A comparative simulation study of the different variations of PZT piezoelectric material by using a MEMS vibration energy harvester

B Debnath, R Kumar - IEEE Transactions on Industry …, 2022 - ieeexplore.ieee.org
In this article, the presented work aims to scavenge maximum electrical outputs by using the
novel microelectromechanical system flared-U shaped spring based piezoelectric vibration …

A MEMS piezoelectric vibration energy harvester based on trapezoidal cantilever beam array

X He, Q Wen, Z Wen, X Mu - 2020 IEEE 33rd International …, 2020 - ieeexplore.ieee.org
This paper reports a novel MEMS piezoelectric vibration energy harvester based on
trapezoidal cantilever beam array (TCBA-PVEH), which mainly composed of a piezoelectric …

Theoretical and experimental studies on MEMS variable cross-section cantilever beam based piezoelectric vibration energy harvester

X He, D Li, H Zhou, X Hui, X Mu - Micromachines, 2021 - mdpi.com
The piezoelectric vibration energy harvester (PVEH) based on the variable cross-section
cantilever beam (VCSCB) structure has the advantages of uniform axial strain distribution …

Design and simulation study of a new flared-U shaped springs based MEMS piezoelectric vibration energy harvester

B Debnath, R Kumar - 2020 IEEE International Conference on …, 2020 - ieeexplore.ieee.org
The paper presents a MEMS energy harvester based on new two symmetrical Flared-U
shaped unimorph spring structures which is capable to harvest energy from low frequency …