Integrated CMOS-MEMS with on-chip readout electronics for high-frequency applications
A bridge-shaped first-lateral-mode 60-MHz mechanical resonator, which is monolithically
integrated with capacitive CMOS readout electronics, is presented. The resonator is …
integrated with capacitive CMOS readout electronics, is presented. The resonator is …
Fully CMOS integrated low voltage 100 MHz MEMS resonator
The development of a novel fully integrated microelectromechanical system (MEMS) for RF
purposes is presented. It is composed of a paddle polysilicon micro-resonator …
purposes is presented. It is composed of a paddle polysilicon micro-resonator …
A CMOS-MEMS resonator integrated system for oscillator application
This paper focuses on the design and development of a CMOS-MEMS resonator integrated
with an on-chip amplifier with emphasis on its single-chip frequency reference oscillator …
with an on-chip amplifier with emphasis on its single-chip frequency reference oscillator …
A generalized CMOS-MEMS platform for micromechanical resonators monolithically integrated with circuits
A generalized foundry-oriented CMOS-MEMS platform well suited for integrated
micromechanical resonators alongside IC amplifiers has been developed for commercial …
micromechanical resonators alongside IC amplifiers has been developed for commercial …
A generalized foundry CMOS platform for capacitively-transduced resonators monolithically integrated with amplifiers
WC Chen, CS Chen, KA Wen, LS Fan… - 2010 IEEE 23rd …, 2010 - ieeexplore.ieee.org
A generalized foundry CMOS-MEMS platform suited for integrated micromechanical
resonator circuits have been developed for commercial multi-user purpose and …
resonator circuits have been developed for commercial multi-user purpose and …
Advanced CMOS–MEMS resonator platform
Deep-submicrometer-gap CMOS-MEMS “composite” resonators fabricated using 0.18-μm-1-
poly-6-metal foundry CMOS technology have been demonstrated for the first time to …
poly-6-metal foundry CMOS technology have been demonstrated for the first time to …
Cmos-integrated rf mems resonators
MK Zalalutdinov, JD Cross, JW Baldwin… - Journal of …, 2010 - ieeexplore.ieee.org
We present a design approach that enables monolithic integration of high-quality-factor (Q)
radio-frequency (RF) microelectromechanical systems (MEMS) resonators with CMOS …
radio-frequency (RF) microelectromechanical systems (MEMS) resonators with CMOS …
High- Integrated CMOS-MEMS Resonators With Deep-Submicrometer Gaps and Quasi-Linear Frequency Tuning
Integrated CMOS-MEMS free-free beam resonators using pull-in mechanism to enable deep-
submicrometer electrode-to-resonator gap spacing without interference in their mechanical …
submicrometer electrode-to-resonator gap spacing without interference in their mechanical …
A Low-Voltage CMOS-Microelectromechanical Systems Thermal-Piezoresistive Resonator With
CS Li, MH Li, CC Chen, CH Chin… - IEEE Electron Device …, 2014 - ieeexplore.ieee.org
We report a thermally driven and piezoresistively sensed CMOS-microelectromechanical
systems (MEMS) resonator with quality factor Q> 10000 and stopband rejection of 15 dB …
systems (MEMS) resonator with quality factor Q> 10000 and stopband rejection of 15 dB …
Monolithic CMOS MEMS oscillator circuit for sensing in the attogram range
This letter presents the design, fabrication, and demonstration of a CMOS/
microelectromechanical system (MEMS) electrostatically self-excited resonator based on a …
microelectromechanical system (MEMS) electrostatically self-excited resonator based on a …