Excimer-laser microetching of a variety of materials is applied to the fabrication of surface-
relief optical microstructures of arbitrary morphology, with particular emphasis on computer …

Diffractive optics fabrication is performed by two complementary processing methods that
rely on the photoablation of materials by ultrashort UV laser pulses. The spatially selective …

A holographic lens is used in conjunction with a pulsed ruby laser for machining single and
multiple spots on a 0.12-μm thin film of tantalum deposited on glass. Spot sizes as small as …

New techniques for 3D micromachining by direct laser ablation of materials using excimer
lasers have been developed. Basic to all of these techniques is the use of image projection …

The dry etching of both organic and inorganic materials is gaining wide technological
importance due to its applications in lithography and packaging. Laser etching provides a …

Microablation and transfer of thin metal films using ultrashort, ultraviolet laser radiation has
been studied. A KrF excimer laser (λ= 248 nm) having 500-fs pulse duration is coupled to a …

In the coming years, excimer lasers will play two important roles in microelectronic
fabrication: as new light sources for submicron photolithography, and for direct surface …

Holograms of resolution test masks have been recorded in photoresist using visible and
ultraviolet lasers. Reconstructed images have been projected onto and recorded in …

Publisher Summary This chapter describes the digital holography and the computer-
generated holograms (CGH). Optical holography is a two-step process:(1) the interferometric …

Micro-optics such as diffractive optics and computer generated holograms are essential
components for modern optical design. To reduce their unit fabrication cost we describe a …