Nanoscale calibration of n-type ZnO staircase structures by scanning capacitance microscopy

L Wang, J Laurent, JM Chauveau, V Sallet… - Applied Physics …, 2015 - pubs.aip.org
Cross-sectional scanning capacitance microscopy (SCM) was performed on n-type ZnO
multi-layer structures homoepitaxially grown by molecular beam epitaxy method. Highly …

Characterization of carrier concentration in ZnO nanowires by scanning capacitance microscopy

L Wang, S Guillemin, JM Chauveau… - … status solidi (c), 2016 - Wiley Online Library
Scanning capacitance microscopy (SCM) has been investigated on Ga doped ZnO staircase
multi‐layers grown by molecular beam epitaxy (MBE) and ZnO NWs grown by chemical bath …

Cross-section imaging and p-type doping assessment of ZnO/ZnO: Sb core-shell nanowires by scanning capacitance microscopy and scanning spreading resistance …

L Wang, V Sallet, C Sartel, G Brémond - Applied Physics Letters, 2016 - pubs.aip.org
ZnO/ZnO: Sb core-shell structured nanowires (NWs) were grown by the metal organic
chemical vapor deposition method where the shell was doped with antimony (Sb) in an …

Access to residual carrier concentration in ZnO nanowires by calibrated scanning spreading resistance microscopy

L Wang, JM Chauveau, R Brenier, V Sallet… - Applied Physics …, 2016 - pubs.aip.org
Scanning spreading resistance microscopy (SSRM) was performed on non-intentionally
doped (nid) ZnO nanowires (NWs) grown by metal-organic chemical vapor deposition in …

Quantifying charge carrier concentration in ZnO thin films by Scanning Kelvin Probe Microscopy

C Maragliano, S Lilliu, MS Dahlem, M Chiesa… - Scientific reports, 2014 - nature.com
In the last years there has been a renewed interest for zinc oxide semiconductor, mainly
triggered by its prospects in optoelectronic applications. In particular, zinc oxide thin films …

Local impedance imaging and spectroscopy of polycrystalline ZnO using contact atomic force microscopy

R Shao, SV Kalinin, DA Bonnell - Applied Physics Letters, 2003 - pubs.aip.org
A current detection scanning probe technique is developed that quantifies frequency-
dependent local transport properties. The approach, referred to as nanoimpedance …

Observation of metal–oxide–semiconductor transistor operation using scanning capacitance microscopy

CY Nakakura, DL Hetherington, MR Shaneyfelt… - Applied physics …, 1999 - pubs.aip.org
We report scanning capacitance microscopy (SCM) images of a working p-channel metal–
oxide–semiconductor field-effect transistor (P-MOSFET) during device operation …

Method for the study of semiconductor device operation using scanning capacitance microscopy

CY Nakakura, P Tangyunyong… - Review of scientific …, 2003 - pubs.aip.org
Two-dimensional (2D) dopant profiling techniques have received increasing attention as
critical dimensions of metal–oxide–semiconductor field-effect transistors (MOSFETs) …

Quantitative two-dimensional carrier profiling of a 400 nm complementary metal–oxide–semiconductor device by Schottky scanning capacitance microscopy

T Tran, JN Nxumalo, Y Li, DJ Thomson… - Journal of Applied …, 2000 - pubs.aip.org
Determination of the two-dimensional 2D carrier profiles has emerged as an important issue
for the semiconductor industry. A two-dimensional profile or image is obtained when a cross …

Assessing the electrical activity of individual ZnO nanowires thermally annealed in air

M Bah, TS Tlemcani, S Boubenia, C Justeau… - Nanoscale …, 2022 - pubs.rsc.org
ZnO nanowires (NWs) are very attractive for a wide range of nanotechnological applications
owing to their tunable electron concentration via structural and surface defect engineering. A …