[图书][B] MEMS and microsystems: design, manufacture, and nanoscale engineering

TR Hsu - 2008 - books.google.com
Technology/Engineering/Mechanical A bestselling MEMS text... now better than ever. An
engineering design approach to Microelectromechanical Systems, MEMS and Microsystems …

[图书][B] Nano-and micro-electromechanical systems: fundamentals of nano-and microengineering

SE Lyshevski - 2018 - taylorfrancis.com
Society is approaching and advancing nano-and microtechnology from various angles of
science and engineering. The need for further fundamental, applied, and experimental …

Micro and nano fabrication

HH Gatzen, V Saile, J Leuthold - Springer, Berlin, Heidelberg, 2015 - Springer
Microelectromechanical systems (MEMS) and nanoelectromechanical systems (NEMS) are
miniaturized devices, quite often with a transducer function, and with the smallest structural …

[图书][B] Principles of microelectromechanical systems

KB Lee - 2011 - books.google.com
The building blocks of MEMS design through closed-form solutions Microelectromechanical
Systems, or MEMS, is the technology of very small systems; it is found in everything from …

[图书][B] Nanotechnology: an introduction

J Ramsden - 2016 - books.google.com
Nanotechnology: An Introduction, Second Edition, is ideal for the newcomer to
nanotechnology, someone who also brings a strong background in one of the traditional …

[图书][B] MEMS: applications

M Gad-el-Hak - 2005 - taylorfrancis.com
As our knowledge of microelectromechanical systems (MEMS) continues to grow, so does
The MEMS Handbook. The field has changed so much that this Second Edition is now …

[图书][B] Analysis and design principles of MEMS devices

M Bao - 2005 - books.google.com
Sensors and actuators are now part of our everyday life and appear in many appliances,
such as cars, vending machines and washing machines. MEMS (Micro Electro Mechanical …

[图书][B] Mems/Nems:(1) Handbook techniques and applications design methods,(2) Fabrication techniques,(3) manufacturing methods,(4) Sensors and actuators,(5) …

CT Leondes - 2007 - books.google.com
As miniaturization, batch fabrication, and integrated electronics rapidly enable the
development of a broad range of smart products, MEMs, MOEMS, and NEMS are creating …

[图书][B] The MEMS handbook

M Gad-el-Hak - 2001 - books.google.com
The revolution is well underway. Our understanding and utilization of
microelectromechanical systems (MEMS) are growing at an explosive rate with a worldwide …

Materials issues in microelectromechanical systems (MEMS)

SM Spearing - Acta materialia, 2000 - Elsevier
Microelectromechanical systems (MEMS) have recently become an important area of
technology, building on the success of the microelectronics industry over the past 50 years …