This paper reports, for the first time, on the design, fabrication, and measurement of
piezoelectric nano-actuators and novel stress-compensating NEMS switches based on 10 …

This paper reports the first implementation of ultra thin (100 nm) aluminum nitride (AlN)
piezoelectric layers for the fabrication of vertically deflecting nano-actuators. An average …

This paper reports on the first demonstration of aluminum nitride (AIN) piezoelectric logic
switches that were fabricated with ultra-thin (100nm) AIN films and exhibit a 1 mV threshold …

This letter reports the implementation of ultrathin (100 nm) aluminum nitride (AlN)
piezoelectric layers for the fabrication of vertically deflecting nanoactuators. The films exhibit …

Abstract Nanoelectromechanical (NEM) switches,,,,, have received widespread attention as
promising candidates in the drive to surmount the physical limitations currently faced by …

The scaling of piezoelectric nanoelectromechanical systems (NEMS) is challenged by the
synthesis of ultrathin and high quality piezoelectric films on very thin electrodes. We report …

This paper reports, for the first time, on the demonstration of low voltage and functionally
complete logic elements (NAND and NOR) implemented by using body-biased …

A major challenge associated with the demonstration of high frequency and fast
NanoElectroMechanical Systems (NEMS) components is the ability to efficiently transduce …

This paper reports the design, fabrication, characterization, and scaling analysis of novel
buckling-based nanoelectromechanical relays that use, for the first time, piezoelectric …

Moore's law of transistor scaling, the exponential increase in the number of complementary
metal oxide semiconductor (CMOS) transistors per unit area, continues unabated; however …