[图书][B] Nano-and micro-electromechanical systems: fundamentals of nano-and microengineering

SE Lyshevski - 2018 - taylorfrancis.com
Society is approaching and advancing nano-and microtechnology from various angles of
science and engineering. The need for further fundamental, applied, and experimental …

[图书][B] MEMS and microsystems: design, manufacture, and nanoscale engineering

TR Hsu - 2008 - books.google.com
Technology/Engineering/Mechanical A bestselling MEMS text... now better than ever. An
engineering design approach to Microelectromechanical Systems, MEMS and Microsystems …

[图书][B] MEMS and NEMS: systems, devices, and structures

SE Lyshevski - 2018 - taylorfrancis.com
The development of micro-and nano-mechanical systems (MEMS and NEMS) foreshadows
momentous changes not only in the technological world, but in virtually every aspect of …

[图书][B] Nanotechnology: an introduction

J Ramsden - 2016 - books.google.com
Nanotechnology: An Introduction, Second Edition, is ideal for the newcomer to
nanotechnology, someone who also brings a strong background in one of the traditional …

[图书][B] Mems/Nems:(1) Handbook techniques and applications design methods,(2) Fabrication techniques,(3) manufacturing methods,(4) Sensors and actuators,(5) …

CT Leondes - 2007 - books.google.com
As miniaturization, batch fabrication, and integrated electronics rapidly enable the
development of a broad range of smart products, MEMs, MOEMS, and NEMS are creating …

[图书][B] Handbook of nanoscience, engineering, and technology

WA Goddard III, D Brenner, SE Lyshevski, GJ Iafrate - 2002 - taylorfrancis.com
Nanotechnology, science, and engineering spearhead the 21st century revolution that is
leading to fundamental breakthroughs in the way materials, devices, and systems are …

[PDF][PDF] Nanoelectromechanical systems and modeling

C Ke, HD Espinosa - Handbook of theoretical and computational …, 2005 - academia.edu
Nanoelectromechanical systems (NEMS) are made of electromechanical devices that have
critical dimensions from hundreds to a few nanometers. By exploring nanoscale effects …

[图书][B] Micromanufacturing and nanotechnology

NP Mahalik - 2006 - Springer
Sophisticated miniaturised components and systems may indeed change all kinds of
products and equipment in the most dramatic way. Methodology and design of …

[图书][B] Principles of microelectromechanical systems

KB Lee - 2011 - books.google.com
The building blocks of MEMS design through closed-form solutions Microelectromechanical
Systems, or MEMS, is the technology of very small systems; it is found in everything from …

Micro and nano fabrication

HH Gatzen, V Saile, J Leuthold - Springer, Berlin, Heidelberg, 2015 - Springer
Microelectromechanical systems (MEMS) and nanoelectromechanical systems (NEMS) are
miniaturized devices, quite often with a transducer function, and with the smallest structural …