Monolithic CMOS MEMS oscillator circuit for sensing in the attogram range
This letter presents the design, fabrication, and demonstration of a CMOS/
microelectromechanical system (MEMS) electrostatically self-excited resonator based on a …
microelectromechanical system (MEMS) electrostatically self-excited resonator based on a …
Design, fabrication, and characterization of a submicroelectromechanical resonator with monolithically integrated CMOS readout circuit
In this paper, we report on the main aspects of the design, fabrication, and performance of a
microelectromechanical system constituted by a mechanical submicrometer scale resonator …
microelectromechanical system constituted by a mechanical submicrometer scale resonator …
High- Integrated CMOS-MEMS Resonators With Deep-Submicrometer Gaps and Quasi-Linear Frequency Tuning
Integrated CMOS-MEMS free-free beam resonators using pull-in mechanism to enable deep-
submicrometer electrode-to-resonator gap spacing without interference in their mechanical …
submicrometer electrode-to-resonator gap spacing without interference in their mechanical …
A monolithic CMOS-MEMS oscillator based on an ultra-low-power ovenized micromechanical resonator
A fully monolithic complimentary metal-oxide-semiconductor-microelectormechanical
systems (CMOS-MEMS) oscillator comprised of an ovenized double-ended tuning fork …
systems (CMOS-MEMS) oscillator comprised of an ovenized double-ended tuning fork …
Integrated CMOS-MEMS with on-chip readout electronics for high-frequency applications
A bridge-shaped first-lateral-mode 60-MHz mechanical resonator, which is monolithically
integrated with capacitive CMOS readout electronics, is presented. The resonator is …
integrated with capacitive CMOS readout electronics, is presented. The resonator is …
Advanced CMOS–MEMS resonator platform
Deep-submicrometer-gap CMOS-MEMS “composite” resonators fabricated using 0.18-μm-1-
poly-6-metal foundry CMOS technology have been demonstrated for the first time to …
poly-6-metal foundry CMOS technology have been demonstrated for the first time to …
Electromagnetic actuation and MOS-transistor sensing for CMOS-integrated micromechanical resonators
D Lange, C Hagleitner, C Herzog, O Brand… - Sensors and Actuators A …, 2003 - Elsevier
A combined actuation and deflection sensing technique employing electromagnetic
actuation and piezoresistive MOS-transistor sensing for CMOS-integrated resonators has …
actuation and piezoresistive MOS-transistor sensing for CMOS-integrated resonators has …
Methods for enhanced electrical transduction and characterization of micromechanical resonators
This paper details the design and enhanced electrical transduction of a bulk acoustic mode
resonator fabricated in a commercial foundry MEMS process utilizing 2.5 μm gaps. The I–V …
resonator fabricated in a commercial foundry MEMS process utilizing 2.5 μm gaps. The I–V …
A 3V CMOS-MEMS oscillator in 0.35 μm CMOS technology
This paper presents the design, fabrication and characterization of a fully monolithic 11-MHz
oscillator circuit operating with a low voltage MEMS resonator biased below the nominal 3.3 …
oscillator circuit operating with a low voltage MEMS resonator biased below the nominal 3.3 …
CMOS MEMS oscillator for gas chemical detection
The paper presents the fabrication and demonstration of a CMOS/MEMS electrostatically
self-excited resonator gas detector under various gas exposures. The cantilever resonator …
self-excited resonator gas detector under various gas exposures. The cantilever resonator …