A new fabrication methodology that allows self-alignment of a micromechanical structure to
its anchor (s) has been used to achieve vibrating radial-contour mode polysilicon …

A micromechanical, laterally vibrating disk resonator, fabricated via a technology combining
polysilicon surface-micromachining and metal electroplating to attain submicron lateral …

A vibrating polysilicon micromechanical" hollow-disk" ring resonator obtained by removing
quadrants of material from a solid disk resonator, but purposely leaving intact beams of …

A micromechanical, laterally vibrating disk resonator, fabricated via a technology that
combines polysilicon surface-micromachining and metal electroplating to attain submicron …

Polysilicon wine-glass mode micromechanical disk resonators using a stemless, non-
intrusive suspension structure have been demonstrated in both vacuum and atmospheric …

Vibrating polysilicon micromechanical ring resonators, using a unique extensional wine-
glass-mode shape to achieve lower impedance than previous UHF resonators, have been …

We report disk-shaped silicon optomechanical resonators with frequency up to 1.75 GHz in
the ultrahigh frequency band. Optical transduction of the thermal motion of the disks' in …

This work, the second of two parts, reports on the implementation and characterization of
high-quality factor (Q) side-supported single crystal silicon (SCS) disk resonators. The …

Free-free-beam flexural-mode micromechanical resonators utilizing nonintrusive supports to
achieve measured Qs as high as 8400 at VHF frequencies from 30 to 90 MHz are …

This paper reports the design and electrical characterization of a micromechanical disk
resonator fabricated in single crystal silicon using a foundry SOI micromachining process …