Improved Ni Schottky Contacts on n-Type 4H-SiC Using Thermal Processing

TN Oder, TL Sung, M Barlow, JR Williams… - Journal of electronic …, 2009 - Springer
High-temperature processing was used to improve the barrier properties of three sets of n-
type 4H-SiC Schottky diodes fabricated with Ni Schottky contacts. We obtained an optimum …

Barrier height determination for n-type 4H-SiC schottky contacts made using various metals

R Yakimova, C Hemmingsson, MF Macmillan… - Journal of electronic …, 1998 - Springer
We have studied Schottky barrier contacts to n-type 4H-SiC with Cr, Mo, Ta, W, Au, and Ni.
We have focused on effects of the metal work function, measurement technique and …

Thermal degradation of Ni-based Schottky contacts on 6H–SiC

B Barda, P Macháč, S Cichoň, M Kudrnová - Applied Surface Science, 2011 - Elsevier
We prepared Ni and Ni2Si Schottky contacts on lightly doped (5.5× 1015cm− 3) n-type 6H–
SiC and evaluated their thermal degradation after annealing in the temperature range of 750 …

The influence of temperature treatment on the formation of Ni-based Schottky diodes and ohmic contacts to n-6H-SiC

MG Rastegaeva, AN Andreev, AA Petrov… - Materials Science and …, 1997 - Elsevier
Nickel-based Schottky contacts to n-6H-SiC, subjected to various heat treatments, have
been studied by the capacitancevoltage technique, X-ray diffractometry and AES sputter …

Formation of Ohmic Contacts to n-Type 4H-SiC at Low Annealing Temperatures

V Sundaramoorthy, RA Minamisawa… - Materials Science …, 2018 - Trans Tech Publ
The formation of Ohmic contacts to n-type 4H-SiC layers at low annealing temperature using
dopant segregation technique is reported. n-SiC epilayer was implanted with phosphorous …

4H-SiC Schottky barrier diodes using Mo-, Ti-and Ni-based contacts

D Perrone, M Naretto, S Ferrero, L Scaltrito… - Materials Science …, 2009 - Trans Tech Publ
We have studied different Schottky and ohmic contacts on 4H-SiC with the aim to obtain
Schottky barrier diodes (SBDs) capable to operate at high temperatures, frequencies and …

Ambient temperature characteristics of Schottky contacts on 4H–SiC aged in air at 350° C

AV Adedeji, AC Ahyi, JR Williams, SE Mohney… - Solid-state …, 2010 - Elsevier
A metallization scheme suitable to explore the capability of 4H–SiC for high temperature
applications was designed and fabricated on Schottky barrier diodes (SBDs). The device …

Ideal Ni-based 4H–SiC Schottky barrier diodes with Si intercalation

M Gao, L Fan, Z Chen - Materials Science in Semiconductor Processing, 2020 - Elsevier
Abstract The Ni-based 4H–SiC Schottky barrier diodes (SBDs) with Si intercalation have
been investigated. The electrical properties of SBDs are characterized by temperature …

Formation of low resistivity ohmic contacts to n-type 3C-SiC

J Wan, MA Capano, MR Melloch - Solid-State Electronics, 2002 - Elsevier
In this study, the dependence of nickel contacts to n-type 3C-SiC on anneal temperature is
characterized by the linear transmission line method. It is found that Ni contacts begin to …

The influence of thermal annealing on the characteristics of Au/Ni Schottky contacts on n-type 4H-SiC

E Omotoso, FD Auret, E Igumbor, SM Tunhuma… - Applied Physics A, 2018 - Springer
The effects of isochronal annealing on the electrical, morphological and structural
characteristics of Au/Ni/4 H-SiC Schottky barrier diodes (SBDs) have been studied. Current …