Micro and nano fabrication

HH Gatzen, V Saile, J Leuthold - Springer, Berlin, Heidelberg, 2015 - Springer
Microelectromechanical systems (MEMS) and nanoelectromechanical systems (NEMS) are
miniaturized devices, quite often with a transducer function, and with the smallest structural …
被引用次数：87 相关文章 所有 5 个版本

Microelectro-mechanical systems: Technology and applications

D Bishop, A Heuer, D Williams - MRS Bulletin, 2001 - cambridge.org
Microelectromechanical systems, or MEMS, constitute a group of microdevices that are just
beginning to affect many areas of science and technology. In diverse fields including the …
被引用次数：31 相关文章 所有 3 个版本
[PDF] acsce.edu.in

[图书][B] MEMS and microsystems: design, manufacture, and nanoscale engineering

TR Hsu - 2008 - books.google.com
Technology/Engineering/Mechanical A bestselling MEMS text... now better than ever. An
engineering design approach to Microelectromechanical Systems, MEMS and Microsystems …
被引用次数：1157 相关文章 所有 7 个版本

MEMS/NEMS devices and applications

DJ Young, CA Zorman, M Mehregany - Springer handbook of …, 2010 - Springer
Microelectromechanical systems (MEMS) have played key roles in many important areas, for
example transportation, communication, automated manufacturing, environmental …
被引用次数：31 相关文章 所有 6 个版本

MEMS/NEMS devices and applications

DJ Young, CA Zorman… - Springer Handbook of …, 2004 - ui.adsabs.harvard.edu
Microelectromechanical Systems (MEMS) have played key roles in many important areas,
for example transportation, communication, automated manufacturing, environmental …
被引用次数：21 相关文章 所有 3 个版本

[图书][B] Principles of microelectromechanical systems

KB Lee - 2011 - books.google.com
The building blocks of MEMS design through closed-form solutions Microelectromechanical
Systems, or MEMS, is the technology of very small systems; it is found in everything from …
被引用次数：108 相关文章 所有 3 个版本

Future of microelectromechanical systems (MEMS)

M Bao, W Wang - Sensors and Actuators A: Physical, 1996 - Elsevier
The development of microelectromechanical systems (MEMS) based on micromachining
and microelectronics technologies has been significant for almost a decade. However, it is …
被引用次数：237 相关文章 所有 6 个版本

Materials for microelectromechanical systems

CA Zorman, M Mehregany - MEMS, 2005 - taylorfrancis.com
Without question, one of the most exciting technological developments during the last
decade of the 20th century was the field of microelectromechanical systems (MEMS). MEMS …
被引用次数：24 相关文章

MEMS: micro technology, mega impact

DJ Nagel, ME Zaghloul - IEEE Circuits and Devices Magazine, 2001 - ieeexplore.ieee.org
MEMS: micro technology, mega impact Page 1 Microelectromechanical systems (MEMS) are
devices that have static or moveable components with some dimensions on the scale of a …
被引用次数：89 相关文章 所有 4 个版本

[图书][B] Mems/Nems:(1) Handbook techniques and applications design methods,(2) Fabrication techniques,(3) manufacturing methods,(4) Sensors and actuators,(5) …

CT Leondes - 2007 - books.google.com
As miniaturization, batch fabrication, and integrated electronics rapidly enable the
development of a broad range of smart products, MEMs, MOEMS, and NEMS are creating …
被引用次数：162 相关文章 所有 3 个版本