Microelectromechanical systems, or MEMS, constitute a group of microdevices that are just beginning to affect many areas of science and technology. In diverse fields including the …
Technology/Engineering/Mechanical A bestselling MEMS text... now better than ever. An engineering design approach to Microelectromechanical Systems, MEMS and Microsystems …
DJ Young, CA Zorman, M Mehregany - Springer handbook of …, 2010 - Springer
Microelectromechanical systems (MEMS) have played key roles in many important areas, for example transportation, communication, automated manufacturing, environmental …
DJ Young, CA Zorman… - Springer Handbook of …, 2004 - ui.adsabs.harvard.edu
Microelectromechanical Systems (MEMS) have played key roles in many important areas, for example transportation, communication, automated manufacturing, environmental …
The building blocks of MEMS design through closed-form solutions Microelectromechanical Systems, or MEMS, is the technology of very small systems; it is found in everything from …
M Bao, W Wang - Sensors and Actuators A: Physical, 1996 - Elsevier
The development of microelectromechanical systems (MEMS) based on micromachining and microelectronics technologies has been significant for almost a decade. However, it is …
CA Zorman, M Mehregany - MEMS, 2005 - taylorfrancis.com
Without question, one of the most exciting technological developments during the last decade of the 20th century was the field of microelectromechanical systems (MEMS). MEMS …
DJ Nagel, ME Zaghloul - IEEE Circuits and Devices Magazine, 2001 - ieeexplore.ieee.org
MEMS: micro technology, mega impact Page 1 Microelectromechanical systems (MEMS) are devices that have static or moveable components with some dimensions on the scale of a …
As miniaturization, batch fabrication, and integrated electronics rapidly enable the development of a broad range of smart products, MEMs, MOEMS, and NEMS are creating …