This paper describes the improvement of pull-in stability, contact properties, and reliability of
laterally actuated nanoelectromechanical relays by partitioning the mechanical and …

Laterally actuated nanoelectromechanical relays with compliant source-drain contacts are
presented. The relay sidewalls are coated with a 30 nm-thick conductive layer of titanium …

CMOS scaling has been very successful in generating small, fast, low cost electronics.
However, in advanced CMOS nodes, the total power consumption is dominated by the static …

Laterally actuated polycrystalline silicon nanoelectromechanical (NEM) relays with
enhanced electrical properties are presented. Due to surface oxidation of polysilicon in room …

Design and materials selection for low power laterally actuating nanoelectromechanical relays
Page 1 Design and Materials Selection for Low Power Laterally Actuating Nanoelectromechanical …

This paper reports on the modeling, fabrication, and testing of cantilever-and parallel plate-
based laterally actuated platinum-coated polysilicon nanoelectromechanical (NEM) relays …

Electromechanical relays exhibit inherently zero leakage and sharp hysteresis, which are
compelling for logic and memory applications. We present an overview of the nano-scale …

This paper reports the design, fabrication, characterization, and scaling analysis of novel
buckling-based nanoelectromechanical relays that use, for the first time, piezoelectric …

The design, fabrication, and characterization of the first piezoelectric nanoelectromechanical
relays with sub-1-volt actuation (520 mV) are presented. The low actuation voltage is …

Body-biased microelectromechanical relays previously have been developed for ultralow-
power digital logic applications and demonstrated to reliably switch ON/OFF with sub-50-mV …