Microelectromechanical systems (MEMS) refer to a collection of micro-sensors and
actuators, which can react to environmental change under micro-circuit control. The …

Ultrasmall Radio Frequency and Micro-wave Microelectromechanical systems (RF MEMs),
such as switches, varactors, and phase shifters, exhibit nearly zero power consumption or …

Wireless communication has led to an explosive growth of emerging consumer and military
applications of radio frequency (RF), microwave and millimeter wave circuits and systems …

This paper reviews the recent progress in MEMS for radio frequency (RF) applications from
a device perspective. RF MEMS devices reviewed include switches and relays, tunable …

RF micromachining and microelectromechanical structure (MEMS) technology promise to
provide an innovative approach in the development of effective and low-cost circuits and …

An up-to-date guide to the theory and applications of RF MEMS. With detailed information
about RF MEMS technology as well as its reliability and applications, this is a …

A review of radio frequency microelectromechanical systems (RF MEMS) technology, from
the perspective of its enabling technologies (eg fabrication, RF micromachined components …

Over the past few years, microelectromechanical system (MEMS) based on-chip resonators
have shown significant potential for sensing and high frequency signal processing …

This is the first comprehensive book to address the design of RF MEMS-based circuits for
use in high performance wireless systems. A groundbreaking research and reference tool …

MEMS-based RF components are being developed for various microwave and millimeter-
wave applications. However, most RF MEMS have to be fabricated using GaAs, ceramics …