MOVPE in Ga In As P systems for opto-electronic applications

D Grützmacher, M Glade - Microelectronic engineering, 1992 - Elsevier
We have studied the capabilities of the growth of quantum well structures in the Ga In
As P material system by metalorganic vapor phase epitaxy (MOVPE) for optical …

Metalorganic vapour phase epitaxy grown quantum-well structures within barriers of InP and GaInP-a comparison

W Seifert, N Carlsson, ME Pistol, L Samuelson - Journal of crystal growth, 1994 - Elsevier
In the present work, the quality of hetero-interfaces produced by metalorganic vapor phase
epitaxy (MOVPE) in the InP-based GaInAs/InP system and the GaAs-based GaAs/GaInP …

Influence of different growth techniques on the quality of GaInAs-InP quantum well structures grown by adduct-MOVPE

K Streubel, F Scholz, G Laube, RJ Dieter… - Journal of Crystal …, 1988 - Elsevier
In this paper the influence of different growth interruption techniques on the interface quality
of GaInAs InP quantum well structures is studied. The structures were grown by …

MOVPE of In (GaAs) P/InGaAs MQW structures

P Wiedemann, M Klenk, W Körber, U Koerner… - Journal of crystal …, 1991 - Elsevier
We report on MOVPE growth of In (GaAs) P/InGaAs multi-quantum-well (MQW) structures.
The growth was carried out at a reactor pressure of 20 hPa in an horizontal lamp heated …

Fabrication of GaInAsP/InP Heterostructure for 1.5 µm Lasers by OMVPE

Y MIYAMOTO, C WATANABE… - IEICE …, 1987 - search.ieice.org
Fabrication of GaInAsP/InP heterostructure lasers for 1.5 µm wavelength region by
organometallic vapor phase epitaxy are discussed. Results of growth conditions, which were …

Controlled uniform growth of GaInAsP/InP structures for laser application on 2 inch wafers by LP-MOVPE at 20 mbar

R Meyer, D Grützmacher, H Jürgensen, P Balk - Journal of Crystal Growth, 1988 - Elsevier
This paper reports on the large area growth of GaInAsP/InP structures for 1.3 and 1.55 μm
applications in a LP-MOVPE system at 20 mbar, at conditions comparable to those used for …

Atomic steps in thin GaInAs/lnP quantum‐well structures grown by organometallic vapor phase epitaxy

TY Wang, KL Fry, A Persson, EH Reihlen… - Journal of applied …, 1988 - pubs.aip.org
InP/GaInAs/InP quantum‐well structures have been grown using atmospheric pressure
organometallic vapor phase epitaxy (AP‐OMVPE). The effects of growth parameters such as …

Atomic steps at GaInAs/InP interfaces grown by organometallic vapor phase epitaxy

TY Wang, KL Fry, A Persson, EH Reihlen… - Applied physics …, 1988 - pubs.aip.org
InP/GaInAs/InP quantum well structures have been grown using atmospheric pressure
organometallic vapor phase epitaxy (OMVPE). For thin wells the 10 K photoluminescence …

Interfacial properties of very thin GaInAs/InP quantum well structures grown by metalorganic vapor phase epitaxy

K Streubel, V Härle, F Scholz, M Bode… - Journal of applied …, 1992 - pubs.aip.org
GaInAs/InP single quantum well structures with thicknesses below 5 nm were grown by
metalorganic vapor phase epitaxy at reduced pressure. The sharpness of the …

Large area growth of extremely uniform AlGaAs/GaAs quantum well structures for laser applications by effective LP-MOVPE

D Schmitz, G Strauch, J Knauf, H Jürgensen… - Journal of Crystal …, 1988 - Elsevier
In a production-type LP-MOVPE system at a reactor pressure of 20 mbar, Al x Ga 1− x
As/GaAs structures (0< x< 0.7) have been grown on 2 inch wafers. X-ray and low …