Highly-accurate and non-invasive flowrate monitoring for miniature pipelines using piezoelectric micromachined ultrasonic transducers

Z Li, Z Li, Z Qiao, J Yuan, Q Ma, T Xu, J Li… - Sensors and Actuators A …, 2024 - Elsevier
Noninvasive and real-time flowrate measurement for small pipes is crucial in medical
diagnostics and aviation hydraulic system health monitoring. However, current bulk PZT …

A two-channel ultrasonic flowmeter based on AlN piezoelectric micromachined ultrasonic transducers arrays with improved cross-correlation method

L Shi, M Qu, D Lv, W Liu, J Xie - Journal of Micromechanics and …, 2023 - iopscience.iop.org
This paper presents a highly accurate two-channel ultrasonic flowmeter based on AlN
piezoelectric micromachined ultrasonic transducers (PMUTs) to measure flow rate in small …

Non-contact ultrasonic flow measurement for small pipes based on AlN piezoelectric micromachined ultrasonic transducer arrays

K Zhu, X Chen, M Qu, D Yang, L Hu… - Journal of …, 2021 - ieeexplore.ieee.org
In this paper, we propose a non-contact ultrasonic liquid flowmeter based on AlN
piezoelectric micromachined ultrasonic transducer (PMUT) arrays. Two 10 by 10 PMUT …

Theoretical and experimental evaluation of small flow rate ultrasonic flowmeter

SH Roshanaei, R Askari Moghadam… - Journal of the Brazilian …, 2022 - Springer
In this paper a low-price ultrasonic flowmeter is designed and implemented that measures
the time of flight of ultrasonic signal in low flow rates for small diameter pipes with maximum …

A high accuracy transit-time airflow volumetric flowmeter based on pMUTs arrays

X Chen, C Liu, J Xu, H Chen, Y Wang… - 2019 IEEE 32nd …, 2019 - ieeexplore.ieee.org
This paper describes a high-accuracy airflow volumetric flowmeter using piezoelectric
micromachined ultrasound transducers (pMUTs) arrays based on the transit-time. Two …

A Gas Flow Measurement System Based on Lead Zirconate Titanate Piezoelectric Micromachined Ultrasonic Transducer

T Liu, Z Li, J Zhang, D Li, H Dou, P Wu, J Yang… - Micromachines, 2023 - mdpi.com
Ultrasonic flowmeter is one of the most widely used devices in flow measurement.
Traditional bulk piezoelectric ceramic transducers restrict their application to small pipe …

A Miniaturized Sensing System for Liquid Level and Concentration Based on Piezoelectric Micromachined Ultrasonic Transducers

L Zhang, Y Gao, Z Tong, Q Ping, L Qiu, L Lou - Sensors and Actuators A …, 2024 - Elsevier
This paper presents a system utilizing scandium-doped aluminum nitride (ScAlN)
piezoelectric micromachined ultrasonic transducers (PMUTs) for simultaneous detection of …

A Miniaturized Transit-Time Ultrasonic Flowmeter Using PMUTS for Low-Flow Measurement in Small-Diameter Channels

Y Gao, Z Wu, M Chen, L Lou - 2023 IEEE 36th International …, 2023 - ieeexplore.ieee.org
In this paper, we report a miniaturized transit-time ultrasonic flowmeter (TTUF) for low-flow
measurement in small-diameter channels. The proposed TTUF contains two pieces of ScAlN …

An ultrasonic flowmeter for liquid flow measurement in small pipes using AlN piezoelectric micromachined ultrasonic transducer arrays

K Zhu, X Chen, M Qu, D Yang, L Hu… - … of micromechanics and …, 2020 - iopscience.iop.org
This paper firstly proposes an ultrasonic liquid flowmeter based on AlN piezoelectric
micromachined ultrasonic transducer arrays. By detecting the transit time of ultrasonic wave …

A miniaturized transit-time ultrasonic flowmeter based on ScAlN piezoelectric micromachined ultrasonic transducers for small-diameter applications

Y Gao, M Chen, Z Wu, L Yao, Z Tong, S Zhang… - Microsystems & …, 2023 - nature.com
Transit-time ultrasonic flowmeters (TTUFs) are among the most widely used devices for flow
measurements. However, traditional TTUFs are usually based on a bulk piezoelectric …