This paper describes new developments in the field of nanostructure fabrication and
characterization. On the processing side, problems in the areas of lithography, patterning …

Publisher Summary This chapter discusses the nanofabrication for electronics. Within the
broad classification of nanotechnology one of the most important topics is nanoelectronics. It …

The ability to scale device sizes to below a micrometre, the world of nanotechnology, has led
to the observation of unexpected physical phenomena and to the creation of an entirely new …

The ability to fabricate structures with lateral dimensions in the sub-100-nm range has
opened a new field of research. This paper first reviews recent advances in nanolithography …

The transistor has evolved into the first nanoscale device. The most common form is a
simple switch, the field effect transistor (FET). The modern FET qualifies as a nanoscale …

Nanostructure Physics and Fabrication contains the contributions of an interdisciplinary
group of specialists in nanometer scale fabrication, physics of mesoscopic systems …

DURING THE EIGHTIES NUMEROUS university, government, and industrial research
laboratories in the US and abroad initiated research programs in very small semiconductor …

Generic Methodologies for Nanotechnology: Classification and Fabrication Page 1 1 Generic
methodologies for nanotechnology: classification and fabrication 1.1 INTRODUCTION AND …

The production of high‐performance micro‐and optoelectronic circuits with constant physical
properties requires not only qualitative control but also quantitative determination of the …

The dimensions of semiconductor devices can now be reduced to the point where quantum-
mechanical effects must be considered in device performance. New device concepts have …