This research examines the energy loss in micromechanical resonators fabricated in a
CMOS-MEMS process. Characterization and understanding of energy loss is a first step to …

The temperature dependence of the quality factor of microelectromechanical system
(MEMS) resonators is analyzed and measured. For silicon MEMS resonators, there are …

This research expands the technology developed for electromechanical filters to CMOS
MEMS mixer-filters. Simple mixer-filters composed of coupled CMOS MEMS resonators mix …

Fundamental characteristics of MEMS resonators such as acoustic velocity and energy
dissipation may have strong temperature and process dependencies that must be carefully …

We report a conventionally batch micromachined silicon tuning fork MEMS resonator, with
ultra-low energy dissipation. The dissipation time constant of 25 minutes was experimentally …

Micromechanical resonators are able to be modeled as second‐order systems, including an
“effective mass” and “effective stiffness,” a resonant frequency, and damping. Damping …

This paper presents the use of our approach to comprehensive measurements of the quality
factor (Q) of 1-MHz microelectromechanical system (MEMS) tuning fork resonators. We …

Abstract Complementary-Metal-Oxide-Silicon Micro-Electrical-Mechanical-Systems (CMOS-
MEMS) technology is a potential platform to provide narrow-band filters and mixers (mixer …

Micromechanical resonators with resonant frequencies from 500 kHz to 10 MHz were built
and examined for several energy loss mechanisms. Thermoelastic damping, clamping loss …

This dissertation is about numerical methods for efficiently simulating damping behavior in
Microelectromechanical Systems (MEMS). Within the class of MEMS devices, focus is put on …