We report a conventionally batch micromachined silicon tuning fork MEMS resonator, with
ultra-low energy dissipation. The dissipation time constant of 25 minutes was experimentally …

Silicon MEMS resonators are increasingly being adopted for applications in timing and
frequency control, as well as precision sensing. It is well established that a key limitation to …

In this paper, we evaluated the influence of the tuning electrodes (TEs), which are added to
a resonator besides a driving electrode, on the vibration of the resonator and made use of it …

An overview of microelectromechanical systems (MEMS) resonators for frequency reference
and timing applications is presented. The progress made in the past few decades in design …

Silicon MEMS resonators with high levels of frequency stability are demonstrated in an
oscillator system suitable for use as a frequency reference. The use of resonator quality …

This paper presents various frequency trimming methodologies with the focus on silicon
based micromechanical resonators. The techniques include mechanical trimming and pure …

We demonstrate two novel dual-mode ovenized MEMS resonators, each with an in-chip
device layer micro-oven that utilizes less than 30mW for resonator temperature control over …

This paper reports on the design, fabrication, and measurement of a novel radio frequency
(RF) microelectromechanical systems (MEMS) tunable all-silicon evanescent-mode cavity …

An oscillator employing a polycrystalline 3C silicon carbide (3C-SiC) folded-beam
microelectromechanical resonator as a frequency-setting component with silicon discrete …

A 180-nm gap micromechanical resonator biased at 20 V and full custom integrated
electronics are used to implement a 13-MHz oscillator that has noise floor of-147 dBc/Hz …