A low-voltage, low-current, digital-driven MEMS mirror for low-power LiDAR
Microelectromechanical (MEMS) mirrors have provided a fast and compact method to
modulate light for mobile-scale projectors, LiDAR, and computational cameras. In this letter …
modulate light for mobile-scale projectors, LiDAR, and computational cameras. In this letter …
MEMS-based imaging LIDAR
Y Takashima, B Hellman, J Rodriguez… - Optics and Photonics …, 2018 - opg.optica.org
MEMS-based Imaging LIDAR Page 1 ET4A.1.pdf Light, Energy and the Environment Congress
2018 (E2, FTS, HISE, SOLAR, SSL) © OSA 2018 MEMS-based Imaging LIDAR Yuzuru …
2018 (E2, FTS, HISE, SOLAR, SSL) © OSA 2018 MEMS-based Imaging LIDAR Yuzuru …
5 V compatible two-axis PZT driven MEMS scanning mirror with mechanical leverage structure for miniature LiDAR application
L Ye, G Zhang, Z You - Sensors, 2017 - mdpi.com
The MEMS (Micro-Electronical Mechanical System) scanning mirror is an optical MEMS
device that can scan laser beams across one or two dimensions. MEMS scanning mirrors …
device that can scan laser beams across one or two dimensions. MEMS scanning mirrors …
Closed-loop control of gimbal-less MEMS mirrors for increased bandwidth in LiDAR applications
V Milanović, A Kasturi, J Yang… - Laser Radar Technology …, 2017 - spiedigitallibrary.org
In 2016, we presented a low SWaP wirelessly controlled MEMS mirror-based LiDAR
prototype which utilized an OEM laser rangefinder for distance measurement [1]. The MEMS …
prototype which utilized an OEM laser rangefinder for distance measurement [1]. The MEMS …
AlScN piezoelectric MEMS mirrors with large field of view for LiDAR application
Y Liu, L Wang, Y Su, Y Zhang, Y Wang, Z Wu - Micromachines, 2022 - mdpi.com
This paper presents AlScN piezoelectric two-axis MEMS mirrors with gimbal-less and
gimbaled designs fabricated in a CMOS-compatible manner. Integrated piezoelectric …
gimbaled designs fabricated in a CMOS-compatible manner. Integrated piezoelectric …
A monolithic forward-view MEMS laser scanner with decoupled raster scanning and enlarged scanning angle for micro LiDAR applications
This paper reports the design, fabrication, and characterization of a forward-view optical
scanner realized by two vertical 2-axis MEMS mirrors integrated on a Silicon Optical Bench …
scanner realized by two vertical 2-axis MEMS mirrors integrated on a Silicon Optical Bench …
Low-voltage wide-field-of-view lidar scanning system based on a MEMS mirror
J Zhou, K Qian - Applied optics, 2019 - opg.optica.org
Lidar has been widely used in many fields, such as autopilots and target detection.
However, commonly used lidar with a rotary mechanical structure has difficulty achieving …
However, commonly used lidar with a rotary mechanical structure has difficulty achieving …
Real-time variable field-of-view scanning of LiDAR by controlling the drive voltage of MEMS micromirror
Q Li, Y Yang, S Yan, B Zhang, C Wang - Optik, 2021 - Elsevier
As the new generation of 3D imaging Lidar is being more and more miniaturized, low-cost
and high-precision, micro-electromechanical systems (MEMS) are being considered as core …
and high-precision, micro-electromechanical systems (MEMS) are being considered as core …
Integrated tilt angle sensing for large displacement scanning MEMS mirrors
Y Liu, Y Feng, X Sun, L Zhu, X Cheng, Q Chen, Y Liu… - Optics express, 2018 - opg.optica.org
Fourier transform spectrometers (FTS) based on piston-scanning MEMS mirrors have clear
advantages of small size and low cost. However, the performance of this type of MEMS FTS …
advantages of small size and low cost. However, the performance of this type of MEMS FTS …
Development of the high angular resolution 360° LiDAR based on scanning MEMS mirror
Light detection and ranging (LiDAR) using various operational principles has been applied
in many fields, eg, robotics navigation, autonomous vehicles, unmanned aerial flyers, land …
in many fields, eg, robotics navigation, autonomous vehicles, unmanned aerial flyers, land …