In this paper, we present a new design for a micro-opto-electro-mechanical (MOEMS)
gyroscope based on a whispering-gallery mode (WGM) microdisk resonator and MEMS …

In this paper, the characterization of a whispering gallery mode (WGM) resonator applied in
a novel micro-opto-electro-mechanical system (MOEMS) gyroscope was investigated. The …

A micro optoelectromechanical system (MOEMS) resonator gyroscope based on a
waveguide micro-ring resonator was proposed. This sensor was operated by measuring the …

As an important sensing element, the whispering gallery mode resonator (WGMR)
parameters seriously affect the resonant micro-optic gyroscope (RMOG) performance. This …

In this paper, a novel vibratory optical MEMS gyroscope is proposed, which is composed of
an optical sensing system, an electrostatic comb-drive actuator, and a mass-spring system …

Micro-gyroscopes using micro-electro-mechanical system (MEMS) and micro-opto-electro-
mechanical system (MOEMS) are the new-generation and recently well-developed …

Based on Sagnac effect and MEMS fabrication technique, resonator micro-optic gyro
(RMOG) makes essential sense in promoting miniaturized and sensitive gyros. In this letter …

In this article, a two-dimensional (2-D) tunable photonic crystal wavelength-modulated micro-
opto-electro-mechanical system (MOEMS) gyroscope is reported. The device consists of a …

Piezoelectric micromachined modal gyroscope (PMMG) is a novel kind of rotating rate
sensor, which is based on the special thickness-shear vibrating mode of a piezoelectric …

This paper focuses on a micro-optoelectro-mechanical vibratory gyroscope that provides an
optical output and operates in a resonant condition. A custom fabrication technology, based …