Control of vibratory MEMS gyroscope with the drive mode excited through parametric resonance

T Perl, R Maimon, S Krylov… - … of Vibration and …, 2021 - asmedigitalcollection.asme.org
In this paper, we present a control strategy for a micro-electro-mechanical gyroscope with a
drive mode excited through parametric resonance. The reduced order two degrees-of …

Monolithically integrated resonator microoptic gyro on silica planar lightwave circuit

K Suzuki, K Takiguchi, K Hotate - Journal of Lightwave …, 2000 - ieeexplore.ieee.org
We report a novel configuration of resonator microoptic gyro (MOG), which is monolithically
integrated on silica planar lightwave circuit (PLC) with countermeasures for noise factors …

Optical noise analysis in dual-resonator structural micro-optic gyro

HY Yu, CX Zhang, LS Feng, LF Hong… - Chinese Physics …, 2011 - iopscience.iop.org
A novel micro resonator optic gyroscope comprising a dual-resonator structure is proposed.
This design radically eliminates the noise induced by Rayleigh backscattering, the Kerr …

Current modulation technique used in resonator micro-optic gyro

M Lei, L Feng, Y Zhi, H Liu, J Wang, X Ren, N Su - Applied Optics, 2013 - opg.optica.org
Resonator micro-optic gyro (RMOG) is a promising candidate for the next generation inertial
rotation sensor based on the Sagnac effect. A current modulation technique used in an …

A single-mode single-polarization monolithically silica waveguide ring resonator used in microoptic gyro

L Guo, B Shi, M Zhao, C Chen - Journal of Modern Optics, 2010 - Taylor & Francis
A single-mode single-polarization waveguide (SMSPW) ring resonator for the microoptic
gyro (MOG) was proposed, and it could be monolithically integrated onto a silica planar …

Open-loop experiments of resonator micro-optic gyro

X Zhang, K Zhou - Optoelectronics Letters, 2009 - Springer
An open-loop resonator micro-optic gyro (R-MOG) with a 6 cm-long waveguide-type ring
resonator is set up using the phase modulation spectroscopy technique. In the experiment …

Design, fabrication and experiment of double U-beam MEMS vibration ring gyroscope

H Cao, Y Liu, Z Kou, Y Zhang, X Shao, J Gao, K Huang… - Micromachines, 2019 - mdpi.com
This study presents a new microelectromechanical system, a vibration ring gyroscope with a
double U-beam (DUVRG), which was designed using a combination of mathematical …

A slot-structure MEMS gyroscope working at atmosphere with tunable electrostatic spring constant

S Hu, Z Jin, H Zhu, H Wang… - Journal of …, 2013 - ieeexplore.ieee.org
This paper proposed a novel slot-structure z-axis gyroscope with a positive or negative
electrostatic spring. The slot-structure gyroscope has in-plane drive and sense modes …

On bandwidth characteristics of tuning fork micro-gyroscope with mechanically coupled sense mode

Y Ni, H Li, L Huang, X Ding, H Wang - Sensors, 2014 - mdpi.com
The bandwidth characteristics of a tuning fork micro-gyroscope with mechanically coupled
sense mode were investigated in this paper to provide some references for mechanical …

A dual-mass resonant mems gyroscope design with electrostatic tuning for frequency mismatch compensation

F Pistorio, MM Saleem, A Somà - Applied Sciences, 2021 - mdpi.com
The micro-electro-mechanical systems (MEMS)-based sensor technologies are considered
to be the enabling factor for the future development of smart sensing applications, mainly …