Abstract Incorporating optical Whispering Gallery Mode (WGM) microresonators in real life
sensing applications is of great interest due to their tiny volumes and very high quality …

This review surveys micromachined gyroscope structure and circuitry technology. The
principle of micromachined gyroscopes is first introduced. Then, different kinds of MEMS …

This paper reports the design and analysis of a single drive mass three axis
Microelectromechanical systems (MEMS) gyroscope. The proposed MEMS gyroscope …

The waveguide-type ring resonator (WRR) is the key rotation-sensing element in a resonant
micro-optic gyroscope (RMOG). A universal model used to analyze both the polarization …

This paper reports a novel gimbal-type torsional micromachined gyroscope with a non-
resonant actuation scheme. The design concept is based on employing a 2 degrees-of …

In order to improve its structural sensitivity, a vibratory microgyroscope is commonly sealed
in high vacuum to increase the drive mode quality factor. The sense mode quality factor of …

This paper reports the design, fabrication, package and tests of a highly symmetric micro-
machined vibrating ring gyroscope (MVRG). The ring is electrostatically driven, capacitively …

A novel structure of micro-machined vibrating ring gyroscope (MVRG) with electromagnetic
excitation and detection is proposed, which consists of a ring and eight pairs of symmetric …

A novel method is investigated in this paper to estimate the temperature's influence upon the
resonant frequency (RESF) and quality factor (Q) of a vacuum packaged Micro-Electro …

The highly efficient coupling of light from conventional optical components to optical mode
volumes lies in the heart of chip-based micro-devices, which is determined by the mode …