Structure design and fabrication of a novel dual-mass resonant output micromechanical gyroscope

J Li, J Fang, H Dong, Y Tao - Microsystem technologies, 2010 - Springer
A novel dual-mass resonant output micromechanical gyroscope is proposed which utilizes
resonant sensing as the basis for Coriolis force detection instead of displacement sensing. It …

Resonator micro optic gyro with double phase modulation technique using an FPGA-based digital processor

Z Jin, G Zhang, H Mao, H Ma - Optics Communications, 2012 - Elsevier
Experiments on resonator micro-optic gyro (RMOG) with a digital proportional integral (PI)
feedback scheme are performed. In this experimental setup, the key rotation sensing …

Design, simulation, and fabrication of silicon-on-insulator MEMS vibratory decoupled gyroscope

P Verma, VS Pavelyev, BO Volodkin… - Компьютерная …, 2016 - cyberleninka.ru
This paper reports the design and fabrication of a 2-degree-of-freedom (DOF) decoupled
vibratory gyroscope based on a silicon-on-insulator (SOI) MEMS process. The 2-DOF …

Design of micromachined vibratory gyroscope with two degree-of-freedom drive-mode and sense-mode

W Wang, X Lv, F Sun - IEEE Sensors Journal, 2012 - ieeexplore.ieee.org
In this paper, a novel micromachined vibratory gyroscope is proposed, where a two degree-
of-freedom (2-DOF) architecture with two masses and three springs is utilized in both drive …

Investigation, modeling, and experiment of an MEMS S-springs vibrating ring gyroscope

Z Kou, J Liu, H Cao, Z Han, Y Sun, Y Shi… - Journal of Micro …, 2018 - spiedigitallibrary.org
This study presents a microelectromechanical systems S-springs vibration ring gyroscope
(MSVRG), which is driven by electrostatic force and detected by capacitance. First, a ring …

Design and vibration sensitivity analysis of a MEMS tuning fork gyroscope with an anchored diamond coupling mechanism

Y Guan, S Gao, H Liu, L Jin, S Niu - Sensors, 2016 - mdpi.com
In this paper, a new micromachined tuning fork gyroscope (TFG) with an anchored diamond
coupling mechanism is proposed while the mode ordering and the vibration sensitivity are …

Resonant micro optic gyroscope equipped with multi-turn waveguide ring resonator

Y Lin, W Qian, H Li, H Ma, Z Jin - Optics Communications, 2021 - Elsevier
Waveguide ring resonator (WRR) is beneficial to the miniaturization and integration of the
resonant micro optic gyroscope (RMOG). The shot-noise-limited sensitivity of the RMOG …

Research on reference vibration for a two-axis piezoelectric micro-machined gyroscope

Y Lu, X Wu, W Zhang, W Chen, F Cui… - … of Micromechanics and …, 2010 - iopscience.iop.org
This paper presents a new method for vibratory gyroscopes. A novel special vibration is
presented, and when it is taken as a reference vibration, the device can sense two-axis …

A symmetric surface micromachined gyroscope with decoupled oscillation modes

SE Alper, T Akin - Sensors and Actuators A: Physical, 2002 - Elsevier
This paper reports a new symmetric gyroscope structure that allows both matched resonant
frequencies for the drive and sense vibration modes for better sensitivity, and also …

Experiments on resonator micro-optic gyro using external cavity laser diode

M Lei, L Feng, Y Zhi, H Liu, N Su - Optical Engineering, 2012 - spiedigitallibrary.org
Based on the Sagnac effect, a resonator micro-optic gyro (RMOG) is a novel optical sensor
used for measuring rotation velocity. Due to the advantages of small volume, narrow …