This paper reports a structural design of a torsional micro-gyroscope having robust drive and
sense modes. The structure achieves robustness by utilizing dynamic amplification of …

This work presents the design, analysis, simulation and experiment of a novel ring vibratory
gyroscope based on piezoelectric effect. The gyroscope has a simple millimeter-scale …

This paper reports a novel four-degrees-of-freedom (DOF) nonresonant micromachined
gyroscope design concept that addresses two major MEMS gyroscope design challenges …

In this letter, a design technique is presented to reduce the cross-axis sensitivity (CAS) in
single-drive multi-axis microelectromechanical systems (MEMS) gyroscope. A design …

In this paper, a doubly decoupled vibrating wheel gyroscope with novel torsional sensing
comb capacitors is presented. The doubly decoupled design and symmetrical structure can …

The resonant micro-optic gyroscope (RMOG) is one of the most promising candidates for
chip-scale optoelectronic gyroscopes. A broadband source-driven RMOG based on a multi …

The ring resonator is one of the key elements in the micro-optic gyro system, but there is not
a uniform method for designing the parameters of a ring resonator, especially for its size. In …

This paper describes the design of the control loops in a z-axis, MEMS vibrational gyroscope
operating in a vacuum enclosure. In this device, a silicon mass is driven through electrostatic …

MEMS devices such as a vibratory gyroscope often suffer from a lower yield rate due to
fabrication errors and external stress. In the decoupled vibratory gyroscope, the main factor …

A new robust multi-degree of freedom (multi-DOF) MEMS gyroscope is presented in this
paper. The designed gyroscope has its bandwidth and amplification factor of the sense …