A novel design of high resolution MEMS gyroscope using mode-localization in weakly coupled resonators

SAR Bukhari, MM Saleem, A Hamza, SA Bazaz - IEEE Access, 2021 - ieeexplore.ieee.org
This paper presents a novel design for a high resolution microelectromechanical systems
(MEMS) technology based resonant gyroscope using the mode-localization effect in weekly …

Bandwidth and noise analysis of high-Q MEMS gyroscope under force rebalance closed-loop control

F Bu, B Fan, D Xu, S Guo, H Zhao - Journal of Micromechanics …, 2021 - iopscience.iop.org
The force-to-rebalance (FTR) closed-loop detection method is commonly used to expand the
bandwidth (BW) for micro-electro-mechanical system (MEMS) gyroscopes with low …

Design and vibration sensitivity of a MEMS tuning fork gyroscope with anchored coupling mechanism

Y Guan, S Gao, L Jin, L Cao - Microsystem Technologies, 2016 - Springer
In this paper, a novel MEMS tuning fork gyroscope with anchored coupling mechanism is
designed to analyze the mode ordering and vibration sensitivity. The proposed TFG …

[HTML][HTML] A filtering algorithm of MEMS gyroscope to resist acoustic interference

Y Sun, P Guo, L Feng, C Xing, J Wu - Sensors, 2020 - mdpi.com
To reduce the impact of acoustic interference in a microelectromechanical system (MEMS)
gyroscope and to improve the reliability of output data, a filtering algorithm based on …

Design, fabrication, and experiment of a decoupled multi-frame vibration MEMS gyroscope

H Cao, Q Cai, Y Zhang, C Shen, Y Shi… - IEEE Sensors …, 2021 - ieeexplore.ieee.org
A z-axis decoupled multi-frame vibration MEMS gyroscope (DMFVMG) is presented in this
paper. Firstly, the decoupled principle is employed and the sense frame, Coriolis frame and …

Modelling and optimization of single drive 3-axis MEMS gyroscope

H Din, F Iqbal, B Lee - Microsystem Technologies, 2020 - Springer
This paper presents a design optimization approach for a single-drive, 3-axis
Microelectromechanical Systems (MEMS) gyroscope. Mathematical models for springs are …

An experimental and theoretical investigation of a micromirror under mixed-frequency excitation

S Ilyas, A Ramini, A Arevalo… - Journal of …, 2015 - ieeexplore.ieee.org
We present an experimental and theoretical investigation of a micromachined mirror under a
mixed-frequency signal composed of two harmonic ac sources. The micromirror is made of …

Design of piezoelectric MEMS bulk acoustic wave mode-matched gyroscopes based on support transducer

NM Nguyen, CY Chang, G Pillai… - 2021 IEEE 34th …, 2021 - ieeexplore.ieee.org
This work reports a novel design for high-frequency piezoelectric gyroscopes using support
transducer which enables an efficient energy coupling from a length-extensional mode into …

Robust design of a decoupled vibratory microgyroscope considering over-etching as a fabrication tolerance factor

SK Ha, HM Jeong, J Kim - JSME International Journal Series A Solid …, 2006 - jstage.jst.go.jp
A robust optimal design of a bulk-micromachined, decoupled vibratory microgyroscope was
carried out to determine geometric dimensions such that the gyroscopic performance is least …

Optical gyroscope with whispering gallery mode optical cavities

AB Matsko, AA Savchenkov, VS Ilchenko… - Optics Communications, 2004 - Elsevier
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