This paper presents a double-sided gyroscope that uses a novel vibrating MOEMS structure
via a hybrid plasmonic readout circuit. The proposed mechanism is based on the Coriolis …

A novel electrostatic-driven tuning fork micromachined gyroscope with a bar structure is
presented. The gyroscope is fabricated by silicon–glass bonding and deep reactive ion …

Recently, consumer applications have dramatically created the demand for low-cost and
compact gyroscopes. Therefore, on the basis of microelectromechanical systems (MEMS) …

This study presents a new MEMS vibrating ring gyroscope (VRG), which is driven by
electrostatic force and detected by capacitance. A novel ring resonator with eight S-shaped …

In this paper a vibratory tri-axis gyroscope with single drive and three axes angular rate
sense is presented. Firstly the structural design is proposed. And based on the modal …

The oscillation of the sense mode of the micro-machined Coriolis vibratory gyroscope
(MCVG) with high quality factor (Q) is analyzed in this study and the corresponding force …

In this paper, a novel piezoelectric solid micro-gyroscope with high resistance to shock is
optimized and researched. The operation principle of our novel gyroscope is given and the …

Micro-electro-mechanical system (MEMS) gyroscope is an important sort of inertial sensor
for measuring the angular velocity of spinning structures, which has been extensively …

Abstract Micro-Electro-Mechanical Systems (MEMS) gyroscopes are inertial sensors for the
measurement of angular rates. They have a variety of applications from consumer …

Micro-electro-mechanical system (MEMS) gyroscopes are an important sort of inertial sensor
for identifying parameters of spinning structures, such as the spinning speed and angular …