Methods for manufacturing magnetic tunnel junction structure
K Tokashiki, H Kwon, M Kim - US Patent App. 13/533,385, 2013 - Google Patents
Methods for manufacturing a magnetic tunneljunction struc ture include forming a magnetic
tunnel junction (MTJ) layer by sequentially stacking a first ferromagnetic layer, a tunnel …
tunnel junction (MTJ) layer by sequentially stacking a first ferromagnetic layer, a tunnel …
Magnetic tunnel junction and method for fabricating a magnetic tunnel junction
An improved magnetic tunnel junction device and methods for fabricating the improved
magnetic tunnel junction device are provided. The provided two-etch process reduces …
magnetic tunnel junction device are provided. The provided two-etch process reduces …
Magnetic tunnel junction structure having an oxidized buffer layer and method of fabricating the same
Y Ha, J Lee, HJ Kim, SC Oh, JS Bae… - US Patent App. 11 …, 2007 - Google Patents
There are provided a magnetic tunnel junction structure and a method of fabricating the
same. The magnetic tunnel junction structure includes a lower electrode, a lower mag netic …
same. The magnetic tunnel junction structure includes a lower electrode, a lower mag netic …
Magnetic tunnel junction structure having an oxidized buffer layer and method of fabricating the same
Y Ha, J Lee, HJ Kim, SC Oh, JS Bae, IG Baek - US Patent 7,141,438, 2006 - Google Patents
There are provided a magnetic tunnel junction structure and a method of fabricating the
same. The magnetic tunnel junction structure includes a lower electrode, a lower mag netic …
same. The magnetic tunnel junction structure includes a lower electrode, a lower mag netic …
Magnetic tunnel junction device and fabrication
(57) ABSTRACT A magnetic tunnel junction (MTJ) device and fabrication method is
disclosed. In a particular embodiment, a method is disclosed that includes forming a …
disclosed. In a particular embodiment, a method is disclosed that includes forming a …
Method of forming a magnetic tunnel junction device
X Li - US Patent 7,781,231, 2010 - Google Patents
(57) ABSTRACT A method of manufacturing a magnetic tunnel junction device is disclosed
that includes forming a trench in a Sub strate, depositing a conductive terminal within the …
that includes forming a trench in a Sub strate, depositing a conductive terminal within the …
Magnetic tunnel junction device and fabrication
X Li, SH Kang, X Zhu - US Patent 8,912,012, 2014 - Google Patents
(57) ABSTRACT A magnetic tunnel junction (MTJ) device and fabrication method is
disclosed. In a particular embodiment, a method is disclosed that includes forming a …
disclosed. In a particular embodiment, a method is disclosed that includes forming a …
Magnetic tunnel junction with reduced damage
CH Diaz, RL Lee - US Patent 9,905,751, 2018 - Google Patents
A method includes patterning a metal layer to form a plurality of bottom electrode features,
forming a Magnetic Tunnel Junction (MTJ) stack by a line-of-sight deposition process such …
forming a Magnetic Tunnel Junction (MTJ) stack by a line-of-sight deposition process such …
Manufacturing techniques and devices for magnetic tunnel junction devices
HW Tien, WH Liao, PR Dai, CW Lu, CJ Lee - US Patent 10,622,551, 2020 - Google Patents
(Continued) Primary Examiner Ngan V Ngo (74) Attorney, Agent, or Firm Maschoff Brennan
(57) ABSTRACT A method for forming a semiconductor device is provided. The method …
(57) ABSTRACT A method for forming a semiconductor device is provided. The method …
Magnetic tunnel junction structure
X Li - US Patent 9,029,170, 2015 - Google Patents
A magnetic tunnel junction (MTJ) device is formed by a process that includes forming a
trench in a substrate and depositing an MTJ structure within the trench. The MTJ structure …
trench in a substrate and depositing an MTJ structure within the trench. The MTJ structure …