μm-resolved high resolution X-ray diffraction imaging for semiconductor quality control
D Lübbert, T Baumbach, J Härtwig, E Boller… - Nuclear Instruments and …, 2000 - Elsevier
We present a method and an equipment for performing μm-resolved X-ray diffraction area
maps, and apply it to wafer defect analysis and industrial wafer quality inspection. The …
maps, and apply it to wafer defect analysis and industrial wafer quality inspection. The …
McXtrace: a Monte Carlo software package for simulating X-ray optics, beamlines and experiments
E Bergbäck Knudsen, A Prodi, J Baltser… - Journal of Applied …, 2013 - journals.iucr.org
This article presents the Monte Carlo simulation package McXtrace, intended for optimizing
X-ray beam instrumentation and performing virtual X-ray experiments for data analysis. The …
X-ray beam instrumentation and performing virtual X-ray experiments for data analysis. The …
Rietveld analysis of computed tomography and its application to methanol to olefin reactor beds
DS Wragg, MG O'Brien, M Di Michiel… - Journal of Applied …, 2015 - journals.iucr.org
This article reports the creation of tomographic reconstructions giving three-dimensional
data on the distribution of various structural features for SAPO-34 zeolite catalyst beds used …
data on the distribution of various structural features for SAPO-34 zeolite catalyst beds used …
SGTools: a suite of tools for processing and analyzing large data sets from in situ X-ray scattering experiments
In situ synchrotron small-angle X-ray scattering (SAXS) is a powerful tool for studying
dynamic processes during material preparation and application. The processing and …
dynamic processes during material preparation and application. The processing and …
[PDF][PDF] dxtbx: The diffraction experiment toolbox
JM Parkhurst, AS Brewster… - Journal of Applied …, 2014 - journals.iucr.org
Data formats for recording X-ray diffraction data continue to evolve rapidly to accommodate
new detector technologies developed in response to more intense light sources. Processing …
new detector technologies developed in response to more intense light sources. Processing …
To get the most out of high resolution X-ray tomography: A review of the post-reconstruction analysis
X-ray microscopy has been well-recognized as one of the most important techniques for
research in a wide range of scientific disciplines including materials science, geoscience …
research in a wide range of scientific disciplines including materials science, geoscience …
Merging data from a multi-detector continuous scanning powder diffraction system
E-mail: fitch@ esrf. fr-vaughan@ esrf. fr-wright@ esrf. fr; WWW: http://www. esrf.
fr/exp_facilities/ID31/contacts. html-http://www. esrf. fr/exp_facilities/ID11/handbook/staff …
fr/exp_facilities/ID31/contacts. html-http://www. esrf. fr/exp_facilities/ID11/handbook/staff …
Quantitative analysis of two-component samples using in-line hard X-ray images
Methods for rapid quantitative phase-sensitive X-ray imaging of non-crystalline samples
consisting of two distinct components are investigated. The transverse spatial distribution of …
consisting of two distinct components are investigated. The transverse spatial distribution of …
Non-destructive mapping of grain orientations in 3D by laboratory X-ray microscopy
SA McDonald, P Reischig, C Holzner, EM Lauridsen… - Scientific reports, 2015 - nature.com
The ability to characterise crystallographic microstructure, non-destructively and in three-
dimensions, is a powerful tool for understanding many aspects related to damage and …
dimensions, is a powerful tool for understanding many aspects related to damage and …