This paper reports the design, fabrication, characterization, and scaling analysis of novel
buckling-based nanoelectromechanical relays that use, for the first time, piezoelectric …

The design, fabrication, and characterization of the first piezoelectric nanoelectromechanical
relays with sub-1-volt actuation (520 mV) are presented. The low actuation voltage is …

CMOS scaling has been very successful in generating small, fast, low cost electronics.
However, in advanced CMOS nodes, the total power consumption is dominated by the static …

Electrostatically actuated nanoelectromechanical (NEM) relays are integrated with silicon
nMOS devices. An nMOSFET successfully drives a NEM relay with the MOSFET serving as a …

Since mechanical switches (relays) have zero off-state leakage and perfectly abrupt ON/OFF
switching behavior, in principle they can be operated with a very small voltage swing and …

This paper reports, for the first time, on the design, fabrication, and measurement of
piezoelectric nano-actuators and novel stress-compensating NEMS switches based on 10 …

The need for more energy-efficient solid-state switches beyond complementary metal-oxide-
semiconductor (CMOS) transistors has become a major concern as the power consumption …

The energy efficiency of a CMOS digital logic circuit is fundamentally limited by the nonideal
switching behavior of transistors, specifically their nonzero off-state current and finite …

Sub-50 mV operation of nano-electro-mechanical relays is demonstrated for the first time,
enabled by an anti-stiction molecular coating. Specifically, a self-assembled monolayer of …

We show by simulation that a three-terminal nanoelectromechanical (NEM) relay combined
with a feedback resistor provides a tunable transconductance Gm over an adjustable input …