Radio-frequency microelectromechanical systems (RF MEMS) are highly miniaturized
devices intended to switch, modulate, filter or tune electrical signals from DC to microwave …

This paper reports on design and fabrication aspects of a new microelectromechanical
series switch for switching dc and RF signals. The switch consists of a flexible S-shaped film …

This chapter presents an introduction to radio frequency microelectromechanical systems
(RF MEMS) technologies for wireless applications. It starts with reviewing the operation …

Ultrasmall Radio Frequency and Micro-wave Microelectromechanical systems (RF MEMs),
such as switches, varactors, and phase shifters, exhibit nearly zero power consumption or …

Design considerations and process development for fabricating radio frequency
microelectromechanical systems (RF MEMS) switches on microwave laminate printed circuit …

The term radio frequency (RF) microelectromechanical systems (MEMS) refers to electronic
devices with a moving submillimeter-sized part (beam, comb, disc, or ring), which provide …

This paper presents two methods for counteracting the unwanted deflection due to warping
or buckling effects, which are serious potential problems in many fabrication processes of …

This paper reviews the design and development of different building blocks of RF MEMS sub-
systems. The blocks include switches, tunable capacitors, integrated inductors, filters …

Microelectromechanical systems (MEMS) that are based on flexible substrates are widely
used in flexible, reconfigurable radio frequency (RF) systems, such as RF MEMS switches …

We report on small, low-ohmic RF MEMS switches with a circular membrane actuator
design. A low temperature process is used to manufacture both the MEMS switch as well as …